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Optical deflection measurement for characterization of microelectromechanical systems (MEMS)

Nonintrusive measurement of small out-of-plane motions of microscale structures is critical to the development of microelectromechanical systems (MEMS). This paper presents a low-cost deflection measurement system for MEMS structures based on a fiber optic displacement sensor. The system is demonstr...

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Published in:	IEEE transactions on instrumentation and measurement 2004-08, Vol.53 (4), p.1047-1051
Main Authors:	Firebaugh, S.L., Charles, H.K., Edwards, R.L., Keeney, A.C., Wilderson, S.F.
Format:	Article
Language:	English
Subjects:	Calibration Displacement measurement Microelectromechanical systems Micromechanical devices Optical fiber sensors Optical fibers Optical sensors Optical switches Sensor phenomena and characterization Sensor systems
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cited_by	cdi_FETCH-LOGICAL-c317t-54da7503904dc267b92953531ac8bd5124904ccabaa7802cf75567cd465ca4b03
cites	cdi_FETCH-LOGICAL-c317t-54da7503904dc267b92953531ac8bd5124904ccabaa7802cf75567cd465ca4b03
container_end_page	1051
container_issue	4
container_start_page	1047
container_title	IEEE transactions on instrumentation and measurement
container_volume	53
creator	Firebaugh, S.L. Charles, H.K. Edwards, R.L. Keeney, A.C. Wilderson, S.F.
description	Nonintrusive measurement of small out-of-plane motions of microscale structures is critical to the development of microelectromechanical systems (MEMS). This paper presents a low-cost deflection measurement system for MEMS structures based on a fiber optic displacement sensor. The system is demonstrated in the characterization of a microwave switch. The deflection system had a demonstrated sensitivity of 290/spl plusmn/32 /spl mu/V/nm over a deflection range of 100 /spl mu/m. The calibration and linearity of the system are described, and the static and dynamic performance is compared to more elaborate systems.
doi_str_mv	10.1109/TIM.2004.831504
format	article
fullrecord	<record><control><sourceid>proquest_ieee_</sourceid><recordid>TN_cdi_proquest_miscellaneous_28532038</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>1315982</ieee_id><sourcerecordid>28532038</sourcerecordid><originalsourceid>FETCH-LOGICAL-c317t-54da7503904dc267b92953531ac8bd5124904ccabaa7802cf75567cd465ca4b03</originalsourceid><addsrcrecordid>eNpdkD1LA0EQhhdRMEZrC5vDQrS4ZPbrdq-UEDWQkMLYCctmbw4v3EfcvRTx17sxgmA1xTzvy8xDyDWFEaWQj1ezxYgBiJHmVII4IQMqpUrzLGOnZABAdZoLmZ2TixA2AKAyoQbkfbntK2frpMCyRtdXXZs0aMPOY4Ntn5SdT9yH9db16Ksv-wN0ZdJUznd4SPiuwUi0Py1hH3psQnK_mC5eHy7JWWnrgFe_c0jenqaryUs6Xz7PJo_z1HGq-lSKwioJPAdROJapdc5yySWn1ul1ISkTceOcXVurNDBXKikz5QqRSWfFGviQ3B17t7773GHoTVMFh3VtW-x2wTAtOQOuI3j7D9x0O9_G24zWgkIGlEVofITihyF4LM3WV431e0PBHFSbqNocVJuj6pi4OSYqRPyj4zLXjH8Dxht6Pg</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>884106012</pqid></control><display><type>article</type><title>Optical deflection measurement for characterization of microelectromechanical systems (MEMS)</title><source>IEEE Electronic Library (IEL) Journals</source><creator>Firebaugh, S.L. ; Charles, H.K. ; Edwards, R.L. ; Keeney, A.C. ; Wilderson, S.F.</creator><creatorcontrib>Firebaugh, S.L. ; Charles, H.K. ; Edwards, R.L. ; Keeney, A.C. ; Wilderson, S.F.</creatorcontrib><description>Nonintrusive measurement of small out-of-plane motions of microscale structures is critical to the development of microelectromechanical systems (MEMS). This paper presents a low-cost deflection measurement system for MEMS structures based on a fiber optic displacement sensor. The system is demonstrated in the characterization of a microwave switch. The deflection system had a demonstrated sensitivity of 290/spl plusmn/32 /spl mu/V/nm over a deflection range of 100 /spl mu/m. The calibration and linearity of the system are described, and the static and dynamic performance is compared to more elaborate systems.</description><identifier>ISSN: 0018-9456</identifier><identifier>EISSN: 1557-9662</identifier><identifier>DOI: 10.1109/TIM.2004.831504</identifier><identifier>CODEN: IEIMAO</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Calibration ; Displacement measurement ; Microelectromechanical systems ; Micromechanical devices ; Optical fiber sensors ; Optical fibers ; Optical sensors ; Optical switches ; Sensor phenomena and characterization ; Sensor systems</subject><ispartof>IEEE transactions on instrumentation and measurement, 2004-08, Vol.53 (4), p.1047-1051</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2004</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c317t-54da7503904dc267b92953531ac8bd5124904ccabaa7802cf75567cd465ca4b03</citedby><cites>FETCH-LOGICAL-c317t-54da7503904dc267b92953531ac8bd5124904ccabaa7802cf75567cd465ca4b03</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1315982$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,27924,27925,54796</link.rule.ids></links><search><creatorcontrib>Firebaugh, S.L.</creatorcontrib><creatorcontrib>Charles, H.K.</creatorcontrib><creatorcontrib>Edwards, R.L.</creatorcontrib><creatorcontrib>Keeney, A.C.</creatorcontrib><creatorcontrib>Wilderson, S.F.</creatorcontrib><title>Optical deflection measurement for characterization of microelectromechanical systems (MEMS)</title><title>IEEE transactions on instrumentation and measurement</title><addtitle>TIM</addtitle><description>Nonintrusive measurement of small out-of-plane motions of microscale structures is critical to the development of microelectromechanical systems (MEMS). This paper presents a low-cost deflection measurement system for MEMS structures based on a fiber optic displacement sensor. The system is demonstrated in the characterization of a microwave switch. The deflection system had a demonstrated sensitivity of 290/spl plusmn/32 /spl mu/V/nm over a deflection range of 100 /spl mu/m. The calibration and linearity of the system are described, and the static and dynamic performance is compared to more elaborate systems.</description><subject>Calibration</subject><subject>Displacement measurement</subject><subject>Microelectromechanical systems</subject><subject>Micromechanical devices</subject><subject>Optical fiber sensors</subject><subject>Optical fibers</subject><subject>Optical sensors</subject><subject>Optical switches</subject><subject>Sensor phenomena and characterization</subject><subject>Sensor systems</subject><issn>0018-9456</issn><issn>1557-9662</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2004</creationdate><recordtype>article</recordtype><recordid>eNpdkD1LA0EQhhdRMEZrC5vDQrS4ZPbrdq-UEDWQkMLYCctmbw4v3EfcvRTx17sxgmA1xTzvy8xDyDWFEaWQj1ezxYgBiJHmVII4IQMqpUrzLGOnZABAdZoLmZ2TixA2AKAyoQbkfbntK2frpMCyRtdXXZs0aMPOY4Ntn5SdT9yH9db16Ksv-wN0ZdJUznd4SPiuwUi0Py1hH3psQnK_mC5eHy7JWWnrgFe_c0jenqaryUs6Xz7PJo_z1HGq-lSKwioJPAdROJapdc5yySWn1ul1ISkTceOcXVurNDBXKikz5QqRSWfFGviQ3B17t7773GHoTVMFh3VtW-x2wTAtOQOuI3j7D9x0O9_G24zWgkIGlEVofITihyF4LM3WV431e0PBHFSbqNocVJuj6pi4OSYqRPyj4zLXjH8Dxht6Pg</recordid><startdate>20040801</startdate><enddate>20040801</enddate><creator>Firebaugh, S.L.</creator><creator>Charles, H.K.</creator><creator>Edwards, R.L.</creator><creator>Keeney, A.C.</creator><creator>Wilderson, S.F.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>20040801</creationdate><title>Optical deflection measurement for characterization of microelectromechanical systems (MEMS)</title><author>Firebaugh, S.L. ; Charles, H.K. ; Edwards, R.L. ; Keeney, A.C. ; Wilderson, S.F.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c317t-54da7503904dc267b92953531ac8bd5124904ccabaa7802cf75567cd465ca4b03</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2004</creationdate><topic>Calibration</topic><topic>Displacement measurement</topic><topic>Microelectromechanical systems</topic><topic>Micromechanical devices</topic><topic>Optical fiber sensors</topic><topic>Optical fibers</topic><topic>Optical sensors</topic><topic>Optical switches</topic><topic>Sensor phenomena and characterization</topic><topic>Sensor systems</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Firebaugh, S.L.</creatorcontrib><creatorcontrib>Charles, H.K.</creatorcontrib><creatorcontrib>Edwards, R.L.</creatorcontrib><creatorcontrib>Keeney, A.C.</creatorcontrib><creatorcontrib>Wilderson, S.F.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE transactions on instrumentation and measurement</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Firebaugh, S.L.</au><au>Charles, H.K.</au><au>Edwards, R.L.</au><au>Keeney, A.C.</au><au>Wilderson, S.F.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Optical deflection measurement for characterization of microelectromechanical systems (MEMS)</atitle><jtitle>IEEE transactions on instrumentation and measurement</jtitle><stitle>TIM</stitle><date>2004-08-01</date><risdate>2004</risdate><volume>53</volume><issue>4</issue><spage>1047</spage><epage>1051</epage><pages>1047-1051</pages><issn>0018-9456</issn><eissn>1557-9662</eissn><coden>IEIMAO</coden><abstract>Nonintrusive measurement of small out-of-plane motions of microscale structures is critical to the development of microelectromechanical systems (MEMS). This paper presents a low-cost deflection measurement system for MEMS structures based on a fiber optic displacement sensor. The system is demonstrated in the characterization of a microwave switch. The deflection system had a demonstrated sensitivity of 290/spl plusmn/32 /spl mu/V/nm over a deflection range of 100 /spl mu/m. The calibration and linearity of the system are described, and the static and dynamic performance is compared to more elaborate systems.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/TIM.2004.831504</doi><tpages>5</tpages></addata></record>
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issn	0018-9456 1557-9662
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source	IEEE Electronic Library (IEL) Journals
subjects	Calibration Displacement measurement Microelectromechanical systems Micromechanical devices Optical fiber sensors Optical fibers Optical sensors Optical switches Sensor phenomena and characterization Sensor systems
title	Optical deflection measurement for characterization of microelectromechanical systems (MEMS)
url	http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-02T16%3A10%3A57IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_ieee_&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Optical%20deflection%20measurement%20for%20characterization%20of%20microelectromechanical%20systems%20(MEMS)&rft.jtitle=IEEE%20transactions%20on%20instrumentation%20and%20measurement&rft.au=Firebaugh,%20S.L.&rft.date=2004-08-01&rft.volume=53&rft.issue=4&rft.spage=1047&rft.epage=1051&rft.pages=1047-1051&rft.issn=0018-9456&rft.eissn=1557-9662&rft.coden=IEIMAO&rft_id=info:doi/10.1109/TIM.2004.831504&rft_dat=%3Cproquest_ieee_%3E28532038%3C/proquest_ieee_%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c317t-54da7503904dc267b92953531ac8bd5124904ccabaa7802cf75567cd465ca4b03%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=884106012&rft_id=info:pmid/&rft_ieee_id=1315982&rfr_iscdi=true