SIMPL-2: (SIMulated Profiles from the Layout-Version 2)

SIMPL is a computer-aided-design (CAD) tool for simulating the cross-sectional profile of integrated circuits along an arbitrary cut-line drawn on the layout. The linked-list arbitrary polygonal data structure, process specification file, physical process algorithms, graphics display interface, and...

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Bibliographic Details
Published in:IEEE transactions on computer-aided design of integrated circuits and systems 1988-02, Vol.7 (2), p.160-167
Main Authors: Lee, K., Neureuther, A.R.
Format: Article
Language:English
Subjects:
Applied sciences
Circuit simulation
Color
Computational modeling
Computer aided design
Computer displays
Computer graphics
Computer science
control theory
systems
Computer simulation
Data structures
Etching
Exact sciences and technology
Integrated circuit layout
Joining processes
Software
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Description
Summary:SIMPL is a computer-aided-design (CAD) tool for simulating the cross-sectional profile of integrated circuits along an arbitrary cut-line drawn on the layout. The linked-list arbitrary polygonal data structure, process specification file, physical process algorithms, graphics display interface, and linking to external rigorous process simulators of SIMPL-2 are described. SIMPL-2 is capable of displaying in color two-dimensional process effects such as the bird's-beak, lateral diffusion, undercut in etching, and sidewall coverage in deposition, based on its linked-polygonal and grid-type databases. The device profile from the composite can be generated rapidly in several minutes on a VAX 11/780 using elementary internal physical process models. SIMPL-2 can also invoke more rigorous external process simulators through an interface for profile data and transfer of control, providing a heretofore missing link between layout-based CAD tools and process and device simulators.< >
ISSN:0278-0070
1937-4151
DOI:10.1109/43.3145