Numerical simulation of microwave field distribution for bifocal plasma sources

In this paper calculations of the electric field distribution are presented with regard to the development of new plasma sources with bifocal structures. These structures facilitate the separation of microwave emission and microwave concentration. Similar to a focusing optical mirror this approach l...

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Bibliographic Details
Published in:Surface & coatings technology 2005-10, Vol.200 (1-4), p.904-908
Main Authors: Graf, M., Räuchle, E., Urban, H., Kaiser, M., Alberts, L., Emmerich, R., Elsner, P.
Format: Article
Language:English
Subjects:
Applied sciences
Bifocal
Cross-disciplinary physics: materials science
rheology
Ellipse
Exact sciences and technology
Materials science
Metals. Metallurgy
Microwave field concentration
Numerical simulation
Other topics in materials science
Physics
Plasma source
Production techniques
Surface treatment
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Summary:In this paper calculations of the electric field distribution are presented with regard to the development of new plasma sources with bifocal structures. These structures facilitate the separation of microwave emission and microwave concentration. Similar to a focusing optical mirror this approach leads to a concentration of wave energy in a focus region where the plasma can be ignited and maintained. The validity of this approach for microwaves at 2.45 GHz in dependence on geometry and configuration of the structure and the possibility of a linear extension was examined through the following steps: starting with a rectangular waveguide that was elliptically bulged to a bifocal structure in several scales, the same structure was stacked with a passageway in between. A complete removal of inner partitions was examined and finally the influence of a plasma-like absorber in the focus region. The result is a microwave concentration near the focus points and the structures are linearly extendable without bothering crosstalk or other side effects.
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2005.01.073