Superconducting material diagnostics using a scanning near-field microwave microscope

We have developed scanning near-field microwave microscopes which can image electrodynamic properties of superconducting materials on length scales down to about 2 /spl mu/m. The microscopes are capable of quantitative imaging of sheet resistance of thin films, and surface topography. We demonstrate...

Full description

Saved in:
Bibliographic Details
Published in:IEEE transactions on applied superconductivity 1999-06, Vol.9 (2), p.4127-4132
Main Authors: Anlage, S.M., Steinhauer, D.E., Vlahacos, C.P., Feenstra, B.J., Thanawalla, A.S., Wensheng Hu, Dutta, S.K., Wellstood, F.C.
Format: Article
Language:English
Subjects:
COPPER OXIDE
ELECTRICAL CONDUCTIVITY
Electrical resistivity
Electrodynamics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Microscopes
MICROSCOPY
Microwave imaging
MICROWAVES
Near-field scanning optical microscopes
Niobium
Physics
Scanning
Scanning probe microscopes, components and techniques
Spatial resolution
Superconducting materials
Superconducting thin films
SUPERCONDUCTIVITY
Surface resistance
Surface topography
THIN FILMS
Topography
Transistors
YTTRIUM OXIDE
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We have developed scanning near-field microwave microscopes which can image electrodynamic properties of superconducting materials on length scales down to about 2 /spl mu/m. The microscopes are capable of quantitative imaging of sheet resistance of thin films, and surface topography. We demonstrate the utility of the microscopes through images of the sheet resistance of a YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// thin film wafer, images of bulk Nb surfaces, and spatially resolved measurements of T/sub c/ of a YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// thin film. We also discuss some of the limitations of the microscope and conclude with a summary of its present capabilities.
ISSN:1051-8223
1558-2515
DOI:10.1109/77.783934