Toroidal inductors for radio-frequency integrated circuits

Toroidal inductors achieve low loss by constraining magnetic flux to a well-defined path and away from ground planes and semiconducting substrates. This paper presents a micromachined implementation of the toroidal inductor, with focus primarily on microwave integrated circuits on a low-resistivity...

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Bibliographic Details
Published in:IEEE transactions on microwave theory and techniques 2004-02, Vol.52 (2), p.646-654
Main Authors: Liu, W.Y., Suryanarayanan, J., Nath, J., Mohammadi, S., Katehi, L.P.B., Steer, M.B.
Format: Article
Language:English
Subjects:
Frequency
Inductors
Magnetic flux
Magnetic losses
Microwave integrated circuits
Radiofrequency integrated circuits
Semiconductivity
Semiconductor device modeling
Silicon
Substrates
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Summary:Toroidal inductors achieve low loss by constraining magnetic flux to a well-defined path and away from ground planes and semiconducting substrates. This paper presents a micromachined implementation of the toroidal inductor, with focus primarily on microwave integrated circuits on a low-resistivity silicon wafer achieving a Q of 22 and a self-resonant frequency greater than 10 GHz. A verified analytic model is developed.
ISSN:0018-9480
1557-9670
DOI:10.1109/TMTT.2003.822019