Sub-nanometer scale depth patterning on sapphire crystal by femtosecond soft x-ray laser pulse irradiation

Damage thresholds and structures on a metal aluminum and an aluminum oxide crystal induced by the soft x-ray free electron laser irradiations were evaluated. Distinctive differences in damage thresholds and structures were observed for these materials. On the aluminum oxide crystal surface, in parti...

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Bibliographic Details
Published in:Optics letters 2023-10, Vol.48 (19), p.5041-5044
Main Authors: Mikami, Katsuhiro, Ishino, Masahiko, Motoyama, Hiroto, Dinh, Thanh-Hung, Yokomae, Shunya, Yamaguchi, Gota, Egawa, Satoru, Sakaue, Kazuyuki, Mimura, Hidekazu, Higashiguchi, Takeshi, Kubota, Yuya, Owada, Shigeki, Iwasaki, Atsushi, Inubushi, Yuichi, Nishikino, Masaharu
Format: Article
Language:English
Subjects:
Aluminum oxide
Chemical bonds
Cleavage
Crystal surfaces
Femtosecond pulses
Free electron lasers
Laser damage
Peeling
Radiation damage
Sapphire
Soft x rays
Thresholds
X ray lasers
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Summary:Damage thresholds and structures on a metal aluminum and an aluminum oxide crystal induced by the soft x-ray free electron laser irradiations were evaluated. Distinctive differences in damage thresholds and structures were observed for these materials. On the aluminum oxide crystal surface, in particular, a novel, to the best of our knowledge, surface processing, which we suggest defining as “ peeling,” was recognized. Surface structures formed by peeling had extremely shallow patterning of sub-nanometer depth. For the newly observed peeling process, we proposed a scission of chemical bond, i.e., binding energy model, in the crystal.
ISSN:0146-9592
1539-4794
DOI:10.1364/OL.501589