Characterization of metal-oxide nanosensors fabricated with focused ion beam (FIB)

A procedure to contact single metal-oxide nanowires and nanoparticles of different materials using a Dual Beam FIB has been developed. The quality of the electrical contacts has been evaluated and the possibility of extracting the electrical parameters of these nanowires and nanoparticles demonstrat...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2006-10, Vol.118 (1), p.198-203
Main Authors: Hernández-Ramírez, F., Rodríguez, J., Casals, O., Russinyol, E., Vilà, A., Romano-Rodríguez, A., Morante, J.R., Abid, M.
Format: Article
Language:English
Subjects:
Contact
Electric contacts
FIB
Gas nanosensors
Metal oxides
Metal-oxide
Nanocomposites
Nanomaterials
Nanoparticles
Nanostructure
Nanowires
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Summary:A procedure to contact single metal-oxide nanowires and nanoparticles of different materials using a Dual Beam FIB has been developed. The quality of the electrical contacts has been evaluated and the possibility of extracting the electrical parameters of these nanowires and nanoparticles demonstrated. The response of some of them to different gases is presented, proving the feasibility of fabricating metal-oxide nanosensors.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2006.04.022