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Thermal annealing effect on the electrical properties and structural defects density of non-stoichiometric a-GaAs films
Amorphous gallium arsenide (a-GaAs) films were prepared from their constituents using the co-evaporation technique. The temperature dependence of DC conductivity for the as-deposited (fresh) As-rich and that of thermally annealed films over the temperature range 373–553K is measured. Results of the...
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Published in: | Physica. B, Condensed matter Condensed matter, 2005-11, Vol.368 (1-4), p.209-214 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Amorphous gallium arsenide (a-GaAs) films were prepared from their constituents using the co-evaporation technique. The temperature dependence of DC conductivity for the as-deposited (fresh) As-rich and that of thermally annealed films over the temperature range 373–553K is measured. Results of the characteristic electrical parameters indicate non-monotonic behavior during the thermal annealing range 373–423K and a monotonic one in the range 423–553K. Results of the density of structural defect states, using the space-charge-limited current model, are given and discussed in relation to the nature and distribution of defect states regarding their dependence on the thermal treatment. |
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ISSN: | 0921-4526 1873-2135 |
DOI: | 10.1016/j.physb.2005.07.016 |