Highly sensitive thermopile heat power sensor for micro-fluid calorimetry of biochemical processes

A micro-fluid chip calorimeter measuring system with highly stable thermostat (0.1 mK) was developed based on an improved nano calorimetry thin-film thermopile chip with excellent chemical and mechanical reliability fabricated in SU-8 technology for insulation and passivation layers. Biochemical pro...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2005-09, Vol.123, p.354-359
Main Authors: Baier, V., Födisch, R., Ihring, A., Kessler, E., Lerchner, J., Wolf, G., Köhler, J.M., Nietzsch, M., Krügel, M.
Format: Article
Language:English
Subjects:
Biochemistry
Calorimetry
Chip formation
Chips
Enzyme catalyzed reaction
Nano calorimetry
Nanocomposites
Nanostructure
Sensors
Thermopile heat power sensor
Thermopiles
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Summary:A micro-fluid chip calorimeter measuring system with highly stable thermostat (0.1 mK) was developed based on an improved nano calorimetry thin-film thermopile chip with excellent chemical and mechanical reliability fabricated in SU-8 technology for insulation and passivation layers. Biochemical processes (e.g. enzyme catalyzed reaction) can be investigated with heat power detection limit
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2005.05.018