Tb–Fe–Co giant magnetostrictive thin film and its application to force sensor

A giant magnetostrictive material (GMM) has large magnetostriction. Therefore, GMM is successfully applied to many actuators and sensors. Recently, practical micro-actuators and micro-sensors have been anticipated in the industry. In this study, the influence of Co addition to a Tb–Fe GMM thin film...

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Bibliographic Details
Published in:Journal of magnetism and magnetic materials 2005-04, Vol.290, p.861-864
Main Authors: Torii, Y., Wakiwaka, H., Kiyomiya, T., Matsuo, Y., Yamada, Y., Makimura, M.
Format: Article
Language:English
Subjects:
Cobalt
Force sensor
Giant magnetostrictive material
Tb–fe
Tb–fe–co
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Summary:A giant magnetostrictive material (GMM) has large magnetostriction. Therefore, GMM is successfully applied to many actuators and sensors. Recently, practical micro-actuators and micro-sensors have been anticipated in the industry. In this study, the influence of Co addition to a Tb–Fe GMM thin film and the influence of heat treatment were examined. Then the GMM thin film was applied to a force sensor. This paper describes the following: (1) The thin film which made the ratio of cobalt for the sum of iron and cobalt to be 25.5%, and annealing at 300 °C, showed the magnetostriction of 1200 ppm at 80 kA/m. (2) The characteristic of the force sensor that used the GMM thin film with a relative permeability of 210 is examined.
ISSN:0304-8853
DOI:10.1016/j.jmmm.2004.11.395