Low-loss 2- and 4-bit TTD MEMS phase shifters based on SP4T switches

2- and 4-bit microelectromechanical system (MEMS) X- to K/sub u/-band true-time-delay phase shifters with a very low insertion loss are described. The phase shifters are fabricated on 200-/spl mu/m GaAs substrates and the low loss is achieved using MEMS SP4T switches, which reduce the number of swit...

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Bibliographic Details
Published in:IEEE transactions on microwave theory and techniques 2003-01, Vol.51 (1), p.297-304
Main Authors: Guan-Leng Tan, Mihailovich, R.E., Hacker, J.B., DeNatale, J.F., Rebeiz, G.M.
Format: Article
Language:English
Subjects:
Antenna accessories
Computer hacking
Insertion loss
Loss measurement
Micromechanical devices
Phase shifters
Phased arrays
Propagation losses
Radar antennas
Switches
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Summary:2- and 4-bit microelectromechanical system (MEMS) X- to K/sub u/-band true-time-delay phase shifters with a very low insertion loss are described. The phase shifters are fabricated on 200-/spl mu/m GaAs substrates and the low loss is achieved using MEMS SP4T switches, which reduce the number of switches in the signal path by half when compared to conventional designs with SP2T switches. Measurements indicate an insertion loss of -0.6/spl plusmn/0.3 and -1.2/spl plusmn/0.5 dB at 10 GHz for the 2- and 4-bit designs, respectively. The measured losses agreed very well with Momentum simulations and are the lowest reported to date. The 2-bit phase shifter performed well from dc-18 GHz, with -0.8/spl plusmn/0.3-dB insertion loss at 18 GHz and a return loss of
ISSN:0018-9480
1557-9670
DOI:10.1109/TMTT.2002.806509