Modeling and optimal design of piezoelectric cantilever microactuators

A novel model is described for predicting the static behavior of a piezoelectric cantilever actuator with an arbitrary configuration of elastic and piezoelectric layers. The model is compared to deflection measurements obtained from 500-/spl mu/m-long ZnO cantilever actuators fabricated by surface m...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 1997-09, Vol.6 (3), p.266-270
Main Authors: DeVoe, D.L., Pisano, A.P.
Format: Article
Language:English
Subjects:
Applied sciences
Bonding
Capacitive sensors
Design optimization
Exact sciences and technology
Mechanical engineering
Mechanical engineering. Machine design
Microactuators
Piezoelectric actuators
Piezoelectric films
Precision engineering, watch making
Predictive models
Structural beams
Zinc oxide
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Summary:A novel model is described for predicting the static behavior of a piezoelectric cantilever actuator with an arbitrary configuration of elastic and piezoelectric layers. The model is compared to deflection measurements obtained from 500-/spl mu/m-long ZnO cantilever actuators fabricated by surface micromachining. Modeled and experimental results demonstrate the utility of the model for optimizing device design. A discussion of design considerations and optimization of device performance is presented.
ISSN:1057-7157
1941-0158
DOI:10.1109/84.623116