Large area VHF plasma production using a ladder-shaped electrode

VHF excited plasma is produced with a ladder-shaped electrode and the plasma parameters are measured with a heated Langmuir probe. When the discharge frequency (∼ 100 MHz) of the RF power source is increased, the plasma density increases while the electron temperature decreases. Plasma uniformity le...

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Bibliographic Details
Published in:Thin solid films 2006-05, Vol.506 (Complete), p.512-516
Main Authors: Mashima, H., Yamakoshi, H., Kawamura, K., Takeuchi, Y., Noda, M., Yonekura, Y., Takatsuka, H., Uchino, S., Kawai, Y.
Format: Article
Language:English
Subjects:
Ladder-shaped electrode
Phase modulation method
Plasma CVD
VHF plasma
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Summary:VHF excited plasma is produced with a ladder-shaped electrode and the plasma parameters are measured with a heated Langmuir probe. When the discharge frequency (∼ 100 MHz) of the RF power source is increased, the plasma density increases while the electron temperature decreases. Plasma uniformity less than 15% over 1.2 m × 1.5 m is realized by employing the phase modulation method, that is, the pattern of the standing wave on the electrode can be controlled by changing the phase of the RF power.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2005.08.110