ORIENTATION AND FATIGUE IMPROVEMENT OF PZT THIN FILMS ON CUBIC TEXTURED CaRuO3 ELECTRODE

In this study, we report on the (100) cube-textured Pb(Zr 0.4 ,Ti 0.6 )O 3 (PZT) thin films using a conducting perovskite CaRuO 3 (CRO) bottom electrode, and which was compared to the (111) textured PZT on Pt electrode. X-ray diffraction (XRD) reveals that the CRO bottom electrode has a pseudo-cubic...

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Bibliographic Details
Published in:Integrated ferroelectrics 2005-01, Vol.75 (1), p.115-121
Main Authors: PAIK, HANJONG, HONG, JONGIN, JEON, YOUNG-AH, KIM, SUNG KWAN, KIM, YUNSEOK, KIM, YOUNGHA, KIM, YANG SOO, NO, KWANGSOO
Format: Article
Language:English
Subjects:
Conductive perovskite oxide
fatigue improvement
film orientation
Si substrate
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Summary:In this study, we report on the (100) cube-textured Pb(Zr 0.4 ,Ti 0.6 )O 3 (PZT) thin films using a conducting perovskite CaRuO 3 (CRO) bottom electrode, and which was compared to the (111) textured PZT on Pt electrode. X-ray diffraction (XRD) reveals that the CRO bottom electrode has a pseudo-cubic nature on Si, and the PZT thin films prepared on CRO/Si shows a (100) textured growth. PZT films on CRO electrode have a well-saturated ferroelectricity with a remanent polarization (P r ) and coercive field (E c ) of 25 μ C/cm 2 and 75 kV/cm, respectively. These PZT films are more fatigue resistive character than that on Pt bottom electrode.
ISSN:1058-4587
1607-8489
DOI:10.1080/10584580500413442