The scattering of surface acoustic waves by electrical effects in two-dimensional metal film structures

A theory is presented for the scattering of surface acoustic waves by electrical effects in thin metal films of arbitrary shape on the surface of a piezoelectric material. A Green's function approach is used, and an expression for the two-dimensional Green's function appropriate to the pro...

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Bibliographic Details
Published in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 1988-11, Vol.35 (6), p.723-735
Main Authors: Huang, F., Paige, E.G.S.
Format: Article
Language:English
Subjects:
Acoustic scattering
Acoustic wave devices, piezoelectric and piezoresistive devices
Acoustic waves
Applied sciences
Electronics
Exact sciences and technology
Genetic expression
Green's function methods
Piezoelectric films
Piezoelectric materials
Piezoelectric transducers
Reflection
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Shape
Surface acoustic waves
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Summary:A theory is presented for the scattering of surface acoustic waves by electrical effects in thin metal films of arbitrary shape on the surface of a piezoelectric material. A Green's function approach is used, and an expression for the two-dimensional Green's function appropriate to the problem is given. General expressions are obtained for the far-field radiation pattern and for the response of an interdigital transducer to a single scatterer. Expressions for the reflection and velocity perturbation due to periodic arrays of scatterers are also presented. Good agreement is found when the theoretical predictions are compared with a wide range of experimental results on lithium niobate.< >
ISSN:0885-3010
1525-8955
DOI:10.1109/58.9329