Experimental Study on New Bonding Materials for Developing Nano-Grinding Plates

This paper describes a method for experimental development of a novel fixed abrasive nano-grinding plate (FAG-plate) which is proposed for lapping some rigid brittle materials, such as quartz crystal and silicon. The FAG plate is developed with ultraviolet-cured resin by rapid prototyping technology...

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Bibliographic Details
Published in:Key engineering materials 2007-01, Vol.329, p.489-494
Main Authors: Peng, Wei, Lv, Xun, Yao, C.Y., Yuan, Ju Long, Liu, F.Q., Gao, Tao
Format: Article
Language:English
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Summary:This paper describes a method for experimental development of a novel fixed abrasive nano-grinding plate (FAG-plate) which is proposed for lapping some rigid brittle materials, such as quartz crystal and silicon. The FAG plate is developed with ultraviolet-cured resin by rapid prototyping technology. The analysis shows that such FAG-plate can keep its grinding ability constant and continuous and it can make the roughness of machined surface reach to nanometer level. Based on experimental comparisons with conventional free abrasive slurry lapping plates, the lapping process using FAG-plate has several distinct advantages. One is that the machining efficiency is significantly improved. The second is that it improves the surface roughness of machined work-pieces, although it decreases the flatness tolerance of materials. Furthermore, the fixed abrasive nano-grinding plate is made by the new bonding materials- ultraviolet curing resin and thus the fabrication of FAG-plate is convenient and economical.
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.329.489