Niobium microbridges for SQUID applications

Niobium microbridges developed for SQUID applications are discussed. We can reliably produce superconducting films down to a thickness of 50 Angstroms using rf bias sputtering techniques. Bridge patterns of submicron width are produced through electron lithography with a scanning electron microscope...

Full description

Saved in:
Bibliographic Details
Published in:IEEE transactions on magnetics 1975-03, Vol.11 (2), p.782-784
Main Authors: Holdeman, L., Peters, P.
Format: Article
Language:English
Subjects:
Anodes
Electrons
Niobium
Pollution measurement
Satellites
Sputtering
SQUIDs
Substrates
Superconducting films
Superconducting transition temperature
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Niobium microbridges developed for SQUID applications are discussed. We can reliably produce superconducting films down to a thickness of 50 Angstroms using rf bias sputtering techniques. Bridge patterns of submicron width are produced through electron lithography with a scanning electron microscope/flying spot scanner combination. The transition from macroscopic leads to the microbridge is made with a multiple exposure technique. The pattern is reproduced in the superconducting niobium films by sputter etching.
ISSN:0018-9464
1941-0069
DOI:10.1109/TMAG.1975.1058736