Fabrication of optical waveguides using proton beam writing

Proton beam writing is a direct write lithographic technique that can be used to fabricate optical waveguides in a range of materials including polymer and glass. In this paper we demonstrate the proton beam writing method for fabricating waveguides in PMMA, and in Foturan photosensitive glass using...

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Bibliographic Details
Published in:Journal of crystal growth 2006-02, Vol.288 (1), p.209-212
Main Authors: Bettiol, A.A., Venugopal Rao, S., Sum, T.C., van Kan, J.A., Watt, F.
Format: Article
Language:English
Subjects:
Applied sciences
B1 Glasses
B1 Polymers
B3 Waveguides
Circuit properties
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Integrated optics. Optical fibers and wave guides
Optical and optoelectronic circuits
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Summary:Proton beam writing is a direct write lithographic technique that can be used to fabricate optical waveguides in a range of materials including polymer and glass. In this paper we demonstrate the proton beam writing method for fabricating waveguides in PMMA, and in Foturan photosensitive glass using a single step process of end of range refractive index modification. Both these materials are of considerable importance for bio and chemical sensing applications since they can both be directly micromachined either optically using photolithography or by using proton beam writing. The waveguides fabricated in these materials have been characterized optically to determine the propagation loss and the refractive index.
ISSN:0022-0248
1873-5002
DOI:10.1016/j.jcrysgro.2005.12.053