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Crack free monolithic nitride vertical-cavity surface-emitting laser structures and pillar microcavities
We report on the successful fabrication and optical investigation of monolithicly grown GaN based vertical‐cavity surface‐emitting laser structures featuring quality factors of 250. Short‐period AlN/InGaN superlattices are used for the low‐index layers of the distributed Bragg reflectors. Pillar mic...
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Published in: | Physica status solidi. A, Applications and materials science Applications and materials science, 2006-05, Vol.203 (7), p.1749-1753 |
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Main Authors: | , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | We report on the successful fabrication and optical investigation of monolithicly grown GaN based vertical‐cavity surface‐emitting laser structures featuring quality factors of 250. Short‐period AlN/InGaN superlattices are used for the low‐index layers of the distributed Bragg reflectors. Pillar microcavities are realized by focused‐ion‐beam etching. Micro‐photoluminescence measurements reveal the longitudinal and transversal mode spectra of the cavities in good agreement with theoretical calculations based on a vectorial transfer matrix method. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) |
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ISSN: | 1862-6300 0031-8965 1862-6319 |
DOI: | 10.1002/pssa.200565426 |