Planar waveguide devices based on sol–gel-derived photopatternable hybrid material

In this paper, we report the fabrication of rib waveguides and passive waveguide devices such as multimode interference (MMI) splitters using sol–gel organic–inorganic hybrid materials. The multilayered waveguides were developed, using spin-coating and photolithography processes. Optical coupling us...

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Bibliographic Details
Published in:Journal of crystal growth 2006-02, Vol.288 (1), p.176-179
Main Authors: Zhang, X., Zhao, Z., Qian, M., Lee, S.Y., Chin, M.K., Zeng, X., Low, D.K.Y., Lu, A.C.W., Plante, P.
Format: Article
Language:English
Subjects:
Applied sciences
B1. Hybrid sol–gel material
B3. Multimode interference (MMI)
B3. Optical waveguide
Circuit properties
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Integrated optics. Optical fibers and wave guides
Optical and optoelectronic circuits
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Summary:In this paper, we report the fabrication of rib waveguides and passive waveguide devices such as multimode interference (MMI) splitters using sol–gel organic–inorganic hybrid materials. The multilayered waveguides were developed, using spin-coating and photolithography processes. Optical coupling using lasers of 632.8-, 780- and 1550-nm wavelength was conducted by direct fiber end-face coupling to polished waveguide faces. Coupling between waveguides with different separations was studied using groups of identical waveguides. Waveguide propagation loss was characterized using the cutback method, revealing an average loss of 0.3–0.4 dB/cm at 780 nm. MMI effects were detected with 1×2 and 1×4 MMI splitters.
ISSN:0022-0248
1873-5002
DOI:10.1016/j.jcrysgro.2005.12.036