Diamond coating deposition by synergy of thermal and laser methods—A problem revisited

• Published in: Applied surface science 2007-04, Vol.253 (12), p.5233-5239
• Main Authors: Ristić, Gordana S., Trtica, Milan S., Bogdanov, Žarko D., Romčević, Nebojša Ž., Miljanić, Šćepan S.
• Format: Article
• Language: English
• Subjects: Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.); Chemical vapour deposition; CO 2-laser; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Deposition tailoring; Diamond coating; Exact sciences and technology; Fullerenes and related materials; diamonds, graphite; Hot filament; Laser and hot filament synergy; Laser deposition; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Specific materials; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2006.11.045

Diamond coatings were deposited by synergy of the hot filament CVD method and the pulse TEA CO 2 laser, in spectroactive and spectroinactive diamond precursor atmospheres. Resulting diamond coatings are interpreted relying on evidence of scanning electron microscopy as well as microRaman spectroscopy. Thermal synergy component (hot filament) possesses an activating agent for diamond deposition, and contributes significantly to quality and extent of diamond deposition. Laser synergy component comprises a solid surface modification as well as the spectroactive gaseous atmosphere modification. Surface modification consists in changes of the diamond coating being deposited and, at the same time, in changes of the substrate surface structure. Laser modification of the spectroactive diamond precursor atmosphere means specific consumption of the precursor, which enables to skip the deposition on a defined substrate location. The resulting process of diamond coating elimination from certain, desired locations using the CO 2 laser might contribute to tailoring diamond coatings for particular applications. Additionally, the substrate laser modification could be optimized by choice of a proper spectroactive precursor concentration, or by a laser radiation multiple pass through an absorbing medium.