Direct Printing of 3D and Curvilinear Micrometer-Sized Architectures into Solid Substrates with Sub-micrometer Resolution

Micropatterned hydrogel stamps carrying etchant solutions are used to microstructure glass and silicon with complex 3D architectures (see figure and inside cover). A two‐way reaction–diffusion mechanism initiated from the stamp enables direct printing of entire microdevices (left to right: two‐level...

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Bibliographic Details
Published in:Advanced materials (Weinheim) 2006-08, Vol.18 (15), p.2004-2008
Main Authors: Campbell, C. J., Smoukov, S. K., Bishop, K. J. M., Baker, E., Grzybowski, B. A.
Format: Article
Language:English
Subjects:
Hydrogels
Lithography
Microfluidic systems
Micropatterning
Semiconductors
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Summary:Micropatterned hydrogel stamps carrying etchant solutions are used to microstructure glass and silicon with complex 3D architectures (see figure and inside cover). A two‐way reaction–diffusion mechanism initiated from the stamp enables direct printing of entire microdevices (left to right: two‐level microfluidic channels, curvilinear microlenses in glass, nanostructured silicon) into solid substrates with resolution down to 300 nm.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.200600716