Thin Film Deposition Using Spray Pyrolysis

Spray pyrolysis has been applied to deposit a wide variety of thin films. These films were used in various devices such as solar cells, sensors, and solid oxide fuel cells. It is observed that often the properties of deposited thin films depend on the preparation conditions. An extensive review of t...

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Bibliographic Details
Published in:Journal of electroceramics 2005-03, Vol.14 (2), p.103-111
Main Authors: Perednis, Dainius, Gauckler, Ludwig J
Format: Article
Language:English
Subjects:
Fuel cells
Thin films
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Summary:Spray pyrolysis has been applied to deposit a wide variety of thin films. These films were used in various devices such as solar cells, sensors, and solid oxide fuel cells. It is observed that often the properties of deposited thin films depend on the preparation conditions. An extensive review of the effects of spray parameters on film quality is given to demonstrate the importance of the process of optimization. The substrate surface temperature is the most critical parameter as it influences film roughness, cracking, crystallinity, etc. Processes involved in the spray pyrolysis technique are discussed in this review as well.[PUBLICATION ABSTRACT]
ISSN:1385-3449
1573-8663
DOI:10.1007/s10832-005-0870-x