Loading…

Electrodeposited 80Ni–20Fe (Permalloy) as a structural material for high aspect ratio microfabrication

This article summarizes results from a study directed toward evaluating electrodeposited 80Ni–20Fe as a structural material for the LIGA (German acronym for Lithographie, Galvanformung, Abformung, equivalent to lithography, electroplating and molding) process. Microstructure-property characteristics...

Full description

Saved in:
Bibliographic Details
Published in:Materials science & engineering. A, Structural materials : properties, microstructure and processing Structural materials : properties, microstructure and processing, 2006-09, Vol.432 (1), p.149-157
Main Authors: Buchheit, T.E., Goods, S.H., Kotula, P.G., Hlava, P.F.
Format: Article
Language:English
Subjects:
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
cited_by cdi_FETCH-LOGICAL-c342t-1f7d8ce4dc621c86f93ca9776b4d9028ee4dde068bf5cd8784cc49ecbe1b75333
cites cdi_FETCH-LOGICAL-c342t-1f7d8ce4dc621c86f93ca9776b4d9028ee4dde068bf5cd8784cc49ecbe1b75333
container_end_page 157
container_issue 1
container_start_page 149
container_title Materials science & engineering. A, Structural materials : properties, microstructure and processing
container_volume 432
creator Buchheit, T.E.
Goods, S.H.
Kotula, P.G.
Hlava, P.F.
description This article summarizes results from a study directed toward evaluating electrodeposited 80Ni–20Fe as a structural material for the LIGA (German acronym for Lithographie, Galvanformung, Abformung, equivalent to lithography, electroplating and molding) process. Microstructure-property characteristics of pulsed plated and direct current (dc) plated samples were investigated. Little difference was observed in grain structure and crystallographic texture between each type of deposited sample, however, significant compositional modulation across each pulse in the pulse-plated samples was observed using energy dispersive X-ray spectral image analysis. Both types of electroformed samples were found to embrittle when subjected to heat treatments between 300 and 700 °C due to the presence of co-deposited sulfur. Electron microprobe and Auger analysis revealed that the observed embrittlement resulted from the migration of sulfur, entrained during the deposition process, to grain boundaries where it was present as both a uniformly dispersed grain boundary wetting agent as well as in coarse, blocky Ni/Fe sulfides. Conversely, samples heat treated at temperatures above 1000 °C were found to have recovered tensile ductility to values greater than the as-deposited samples.
doi_str_mv 10.1016/j.msea.2006.05.149
format article
fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_29273891</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0921509306010094</els_id><sourcerecordid>29273891</sourcerecordid><originalsourceid>FETCH-LOGICAL-c342t-1f7d8ce4dc621c86f93ca9776b4d9028ee4dde068bf5cd8784cc49ecbe1b75333</originalsourceid><addsrcrecordid>eNp9kM9uFDEMxiNUJLZLX4BTLqBymMFJ5k8i9VJVLSBVwIGeo4zjYbOa2WyTWaTeeAfekCchq63EjZNt-fNn-8fYGwG1ANF92NZzJldLgK6GthaNecFWQveqaozqztgKjBRVC0a9Yuc5bwFANNCu2OZ2IlxS9LSPOSzkuYYv4c-v3xLuiF9-ozS7aYpP77nL3PG8pAMuh-QmPruFUijJGBPfhB-botgXL57cEiKfA6Y4uiEFPNa71-zl6KZMF89xzR7ubr_ffKruv378fHN9X6Fq5FKJsfcaqfHYSYG6G41CZ_q-GxpvQGoqLU_Q6WFs0eteN4iNIRxIDH2rlFqzdyfffYqPB8qLnUNGmia3o3jIVhrZK21EEcqTsNyZc6LR7lOYXXqyAuwRqt3aI1R7hGqhtQVqGXr77O4yumlMboch_5vUoJUsd6zZ1UlH5dWfgZLNGGiH5EMqjKyP4X9r_gJ6BY-X</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>29273891</pqid></control><display><type>article</type><title>Electrodeposited 80Ni–20Fe (Permalloy) as a structural material for high aspect ratio microfabrication</title><source>ScienceDirect Freedom Collection</source><creator>Buchheit, T.E. ; Goods, S.H. ; Kotula, P.G. ; Hlava, P.F.</creator><creatorcontrib>Buchheit, T.E. ; Goods, S.H. ; Kotula, P.G. ; Hlava, P.F.</creatorcontrib><description>This article summarizes results from a study directed toward evaluating electrodeposited 80Ni–20Fe as a structural material for the LIGA (German acronym for Lithographie, Galvanformung, Abformung, equivalent to lithography, electroplating and molding) process. Microstructure-property characteristics of pulsed plated and direct current (dc) plated samples were investigated. Little difference was observed in grain structure and crystallographic texture between each type of deposited sample, however, significant compositional modulation across each pulse in the pulse-plated samples was observed using energy dispersive X-ray spectral image analysis. Both types of electroformed samples were found to embrittle when subjected to heat treatments between 300 and 700 °C due to the presence of co-deposited sulfur. Electron microprobe and Auger analysis revealed that the observed embrittlement resulted from the migration of sulfur, entrained during the deposition process, to grain boundaries where it was present as both a uniformly dispersed grain boundary wetting agent as well as in coarse, blocky Ni/Fe sulfides. Conversely, samples heat treated at temperatures above 1000 °C were found to have recovered tensile ductility to values greater than the as-deposited samples.</description><identifier>ISSN: 0921-5093</identifier><identifier>EISSN: 1873-4936</identifier><identifier>DOI: 10.1016/j.msea.2006.05.149</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>Cross-disciplinary physics: materials science; rheology ; Electrodeposition ; Electrodeposition, electroplating ; Exact sciences and technology ; LIGA ; Materials science ; Methods of deposition of films and coatings; film growth and epitaxy ; Ni–Fe alloys ; Physics ; Sulfur embrittlement</subject><ispartof>Materials science &amp; engineering. A, Structural materials : properties, microstructure and processing, 2006-09, Vol.432 (1), p.149-157</ispartof><rights>2006 Elsevier B.V.</rights><rights>2006 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c342t-1f7d8ce4dc621c86f93ca9776b4d9028ee4dde068bf5cd8784cc49ecbe1b75333</citedby><cites>FETCH-LOGICAL-c342t-1f7d8ce4dc621c86f93ca9776b4d9028ee4dde068bf5cd8784cc49ecbe1b75333</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&amp;idt=18083275$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Buchheit, T.E.</creatorcontrib><creatorcontrib>Goods, S.H.</creatorcontrib><creatorcontrib>Kotula, P.G.</creatorcontrib><creatorcontrib>Hlava, P.F.</creatorcontrib><title>Electrodeposited 80Ni–20Fe (Permalloy) as a structural material for high aspect ratio microfabrication</title><title>Materials science &amp; engineering. A, Structural materials : properties, microstructure and processing</title><description>This article summarizes results from a study directed toward evaluating electrodeposited 80Ni–20Fe as a structural material for the LIGA (German acronym for Lithographie, Galvanformung, Abformung, equivalent to lithography, electroplating and molding) process. Microstructure-property characteristics of pulsed plated and direct current (dc) plated samples were investigated. Little difference was observed in grain structure and crystallographic texture between each type of deposited sample, however, significant compositional modulation across each pulse in the pulse-plated samples was observed using energy dispersive X-ray spectral image analysis. Both types of electroformed samples were found to embrittle when subjected to heat treatments between 300 and 700 °C due to the presence of co-deposited sulfur. Electron microprobe and Auger analysis revealed that the observed embrittlement resulted from the migration of sulfur, entrained during the deposition process, to grain boundaries where it was present as both a uniformly dispersed grain boundary wetting agent as well as in coarse, blocky Ni/Fe sulfides. Conversely, samples heat treated at temperatures above 1000 °C were found to have recovered tensile ductility to values greater than the as-deposited samples.</description><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Electrodeposition</subject><subject>Electrodeposition, electroplating</subject><subject>Exact sciences and technology</subject><subject>LIGA</subject><subject>Materials science</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Ni–Fe alloys</subject><subject>Physics</subject><subject>Sulfur embrittlement</subject><issn>0921-5093</issn><issn>1873-4936</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNp9kM9uFDEMxiNUJLZLX4BTLqBymMFJ5k8i9VJVLSBVwIGeo4zjYbOa2WyTWaTeeAfekCchq63EjZNt-fNn-8fYGwG1ANF92NZzJldLgK6GthaNecFWQveqaozqztgKjBRVC0a9Yuc5bwFANNCu2OZ2IlxS9LSPOSzkuYYv4c-v3xLuiF9-ozS7aYpP77nL3PG8pAMuh-QmPruFUijJGBPfhB-botgXL57cEiKfA6Y4uiEFPNa71-zl6KZMF89xzR7ubr_ffKruv378fHN9X6Fq5FKJsfcaqfHYSYG6G41CZ_q-GxpvQGoqLU_Q6WFs0eteN4iNIRxIDH2rlFqzdyfffYqPB8qLnUNGmia3o3jIVhrZK21EEcqTsNyZc6LR7lOYXXqyAuwRqt3aI1R7hGqhtQVqGXr77O4yumlMboch_5vUoJUsd6zZ1UlH5dWfgZLNGGiH5EMqjKyP4X9r_gJ6BY-X</recordid><startdate>20060925</startdate><enddate>20060925</enddate><creator>Buchheit, T.E.</creator><creator>Goods, S.H.</creator><creator>Kotula, P.G.</creator><creator>Hlava, P.F.</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>20060925</creationdate><title>Electrodeposited 80Ni–20Fe (Permalloy) as a structural material for high aspect ratio microfabrication</title><author>Buchheit, T.E. ; Goods, S.H. ; Kotula, P.G. ; Hlava, P.F.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c342t-1f7d8ce4dc621c86f93ca9776b4d9028ee4dde068bf5cd8784cc49ecbe1b75333</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Electrodeposition</topic><topic>Electrodeposition, electroplating</topic><topic>Exact sciences and technology</topic><topic>LIGA</topic><topic>Materials science</topic><topic>Methods of deposition of films and coatings; film growth and epitaxy</topic><topic>Ni–Fe alloys</topic><topic>Physics</topic><topic>Sulfur embrittlement</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Buchheit, T.E.</creatorcontrib><creatorcontrib>Goods, S.H.</creatorcontrib><creatorcontrib>Kotula, P.G.</creatorcontrib><creatorcontrib>Hlava, P.F.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Materials science &amp; engineering. A, Structural materials : properties, microstructure and processing</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Buchheit, T.E.</au><au>Goods, S.H.</au><au>Kotula, P.G.</au><au>Hlava, P.F.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Electrodeposited 80Ni–20Fe (Permalloy) as a structural material for high aspect ratio microfabrication</atitle><jtitle>Materials science &amp; engineering. A, Structural materials : properties, microstructure and processing</jtitle><date>2006-09-25</date><risdate>2006</risdate><volume>432</volume><issue>1</issue><spage>149</spage><epage>157</epage><pages>149-157</pages><issn>0921-5093</issn><eissn>1873-4936</eissn><abstract>This article summarizes results from a study directed toward evaluating electrodeposited 80Ni–20Fe as a structural material for the LIGA (German acronym for Lithographie, Galvanformung, Abformung, equivalent to lithography, electroplating and molding) process. Microstructure-property characteristics of pulsed plated and direct current (dc) plated samples were investigated. Little difference was observed in grain structure and crystallographic texture between each type of deposited sample, however, significant compositional modulation across each pulse in the pulse-plated samples was observed using energy dispersive X-ray spectral image analysis. Both types of electroformed samples were found to embrittle when subjected to heat treatments between 300 and 700 °C due to the presence of co-deposited sulfur. Electron microprobe and Auger analysis revealed that the observed embrittlement resulted from the migration of sulfur, entrained during the deposition process, to grain boundaries where it was present as both a uniformly dispersed grain boundary wetting agent as well as in coarse, blocky Ni/Fe sulfides. Conversely, samples heat treated at temperatures above 1000 °C were found to have recovered tensile ductility to values greater than the as-deposited samples.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/j.msea.2006.05.149</doi><tpages>9</tpages></addata></record>
fulltext fulltext
identifier ISSN: 0921-5093
ispartof Materials science & engineering. A, Structural materials : properties, microstructure and processing, 2006-09, Vol.432 (1), p.149-157
issn 0921-5093
1873-4936
language eng
recordid cdi_proquest_miscellaneous_29273891
source ScienceDirect Freedom Collection
subjects Cross-disciplinary physics: materials science
rheology
Electrodeposition
Electrodeposition, electroplating
Exact sciences and technology
LIGA
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Ni–Fe alloys
Physics
Sulfur embrittlement
title Electrodeposited 80Ni–20Fe (Permalloy) as a structural material for high aspect ratio microfabrication
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-24T17%3A52%3A23IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Electrodeposited%2080Ni%E2%80%9320Fe%20(Permalloy)%20as%20a%20structural%20material%20for%20high%20aspect%20ratio%20microfabrication&rft.jtitle=Materials%20science%20&%20engineering.%20A,%20Structural%20materials%20:%20properties,%20microstructure%20and%20processing&rft.au=Buchheit,%20T.E.&rft.date=2006-09-25&rft.volume=432&rft.issue=1&rft.spage=149&rft.epage=157&rft.pages=149-157&rft.issn=0921-5093&rft.eissn=1873-4936&rft_id=info:doi/10.1016/j.msea.2006.05.149&rft_dat=%3Cproquest_cross%3E29273891%3C/proquest_cross%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c342t-1f7d8ce4dc621c86f93ca9776b4d9028ee4dde068bf5cd8784cc49ecbe1b75333%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=29273891&rft_id=info:pmid/&rfr_iscdi=true