Glass valveless micropump using electromagnetic actuation

We present a valveless micropump in glass, which is magnetically actuated using the sinusoidal current of an external electromagnet. We employ a powder blasting microerosion process for microstructuring the glass substrates and fusion bonding for assembly of the multi-layered microfluidic chip. The...

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Bibliographic Details
Published in:Microelectronic engineering 2005-03, Vol.78, p.132-137
Main Authors: Yamahata, Christophe, Lacharme, Frédéric, Gijs, Martin A.M.
Format: Article
Language:English
Subjects:
Applied sciences
Diffuser
Electromagnetic actuation
Electronics
Exact sciences and technology
Glass bonding
Magnetic devices
Micropump
Powder blasting
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Summary:We present a valveless micropump in glass, which is magnetically actuated using the sinusoidal current of an external electromagnet. We employ a powder blasting microerosion process for microstructuring the glass substrates and fusion bonding for assembly of the multi-layered microfluidic chip. The reciprocating type micropump contains two nozzle/diffuser elements and a poly(dimethylsiloxane) membrane with embedded permanent magnet. The micropump is self-priming and exhibits a backpressure of 50 mbar and water flow rates up to 1 mL/min. The flow resonance frequency is in excellent agreement with the model of Olsson et al. [Journal of Micromechanics and Microengineering 9 (1999) 34].
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2004.12.018