Micromachined actuators with braking mechanisms

New DRIE actuator systems have been developed which use a high-force, linear actuator to wrap a flexible brake band around the rigid brake shoe of a large-deflection, rotary actuator. The brake can hold the rotary actuator at any arbitrary location within its full range of travel. A third actuator m...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2005-07, Vol.122 (1), p.1-8
Main Authors: Grade, John D., Yasumura, Kevin Y., Jerman, Hal
Format: Article
Language:English
Subjects:
Actuators
Brake
Brakes
Comb drive
Deflection
Electrostatic actuator
Friction
Large deflection
Position (location)
Power failures
Resonant frequencies
Tuning
Vibration
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Summary:New DRIE actuator systems have been developed which use a high-force, linear actuator to wrap a flexible brake band around the rigid brake shoe of a large-deflection, rotary actuator. The brake can hold the rotary actuator at any arbitrary location within its full range of travel. A third actuator may be used to engage a pair of locking pins in order to keep the brake motor extended in the event of a power failure. The 100× increase in rotational stiffness after the brake is applied raises the fundamental resonant frequency by more than an order of magnitude, enabling precision optical adjustments over a large tuning range in the presence of external shock and vibration.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2005.01.040