High-Energy X-ray Microprobe by Multilayer Zone Plate and Microscopy at SPring-8

Microfocusing experiments of high-brilliance, high-energy X-ray by using a multilayer Fresnel zone plates were performed at SPring-8. It is proved that the multilayer FZPs can be used as focusing elements with high spatial resolution in a wide range X-ray wavelength domain up to 100 keV. A Cu/Al FZP...

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Bibliographic Details
Published in:Portable Synchrotron Light Sources and Advanced Applications 2004-01, Vol.716, p.144-147
Main Authors: Tamura, Shigeharu, Yasumoto, Masato, Kamijo, Nagao, Suzuki, Yoshio, Awaji, Mitsuhiro, Takeuchi, Akihisa, Takano, Hidekazu, Uesugi, Kentaro
Format: Article
Language:eng ; jpn
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Summary:Microfocusing experiments of high-brilliance, high-energy X-ray by using a multilayer Fresnel zone plates were performed at SPring-8. It is proved that the multilayer FZPs can be used as focusing elements with high spatial resolution in a wide range X-ray wavelength domain up to 100 keV. A Cu/Al FZP with the thickness of 40 micron has attained the spatial resolution of 0.7 ~ 1.8 micron in a wide range X-ray wavelength domain of 18.6 ~ 113 keV. Three types of microscopic image of an Au mesh with 1500 lines per inch were taken by a X-ray microscopy experiment by using the multilayer FZP at 82 keV: a scanning microscopic transmission image, a scanning microscopic fluorescent one and an imaging microscopic one with the spatial resolution of ~ 0.7 micron. High-energy X-ray microprobe by using the multilayer FZP will be powerful tool for non-destructive various analyses of thick materials (bulk, IC, etc) with submicron spatial resolution.
ISSN:0094-243X
DOI:10.1063/1.1796602