High-Resolution Patterning of Molecular Glasses Using Supercritical Carbon Dioxide

A glass‐forming molecule, consisting of hexa(hydroxyphenyl)benzene [HHPB] protected with six tert‐butoxycarbonyl (t‐Boc) groups, is patterned and developed to produce features as small as 50 nm (see Figure) using supercritical CO2 (scCO2). Protected HHPB was shown to be completely soluble in scCO2 w...

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Bibliographic Details
Published in:Advanced materials (Weinheim) 2006-02, Vol.18 (4), p.442-446
Main Authors: Felix, N. M., Tsuchiya, K., Ober, C. K.
Format: Article
Language:English
Subjects:
Molecular glasses
Photolithography
Supercritical fluids
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Summary:A glass‐forming molecule, consisting of hexa(hydroxyphenyl)benzene [HHPB] protected with six tert‐butoxycarbonyl (t‐Boc) groups, is patterned and developed to produce features as small as 50 nm (see Figure) using supercritical CO2 (scCO2). Protected HHPB was shown to be completely soluble in scCO2 without incorporation of either fluorine or silicon but could be rendered insoluble in scCO2 by acid‐catalyzed removal of the solubilizing t‐Boc groups.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.200501802