Early stage growth behavior of ZnO nanoneedle arrays on Al2O3 (0001) by metalorganic chemical vapor deposition

• Published in: Journal of crystal growth 2005-08, Vol.281 (2-4), p.446-451
• Main Authors: Young Park, Jae, Mok Lee, Jae, Ho Je, Jung, Kim, Sang Sub
• Format: Article
• Language: English
• Subjects: Anelasticity, internal friction, stress relaxation, and mechanical resonances; Applied sciences; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Electronics; Exact sciences and technology; Materials science; Mechanical and acoustical properties of condensed matter; Methods of crystal growth; physics of crystal growth; Optoelectronic devices; Physics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
• ISSN: 0022-0248; 1873-5002
• DOI: 10.1016/j.jcrysgro.2005.04.035

Early stage growth behavior of vertically aligned ZnO nanoneedles by metalorganic chemical vapor deposition was investigated mainly using X-ray diffraction. In very early stages of growth, 3-dimensional island-like ZnO grains initially nucleate and grow on the substrate surface, then cover its whole surface, consequently resulting in formation of a continuous layer. The layer grows epitaxially with a 30DG rotation of ZnO basal planes with respect to the Al2O3 (0 0 0 1) substrate, while being coherently strained to the substrate. On top of the existing well-aligned continuous ZnO layer, vertically as well as laterally aligned nanoneedles start to grow as the growth proceeds further. The onset of the nucleation and growth of nanoneedles is likely to be associated with the relaxation of a compressive strain developed in the continuous ZnO layer formed before the growth of nanoneedles.