Preparation of flexible and heat-resisting conductive transparent film by the pyrosol process

• Published in: Thin solid films 2006-12, Vol.515 (4), p.2310-2315
• Main Authors: Usami, Hisanao, Nakasa, Akihiko, Adachi, Mami, Suzuki, Eiji, Fujimatsu, Hitoshi, Ohashi, Tatsuya, Yamada, Shigeo, Tsugita, Kouhei, Taniguchi, Yoshio
• Format: Article
• Language: English
• Subjects: Applied sciences; Condensed matter: structure, mechanical and thermal properties; Electronics; Exact sciences and technology; Flexible indium tin oxide; Light emitting diode; Mica; Optoelectronic devices; Physical properties of thin films, nonelectronic; Physics; Pyrosol process; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thermal stability; thermal effects
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2006.03.063

A pyrosol process was successfully applied for the preparation of a flexible, conductive, and transparent inorganic film, a tin-doped indium oxide (ITO) film lined with a thin mica layer. This flexible heat-resistant ITO-mica film exhibited high conductivity and transparency, comparable to ITO deposited on glass substrate. The minimum radius of bending for the film, without any recognizable change in the conductivity and appearance, was 8 mm. The ITO deposited on mica showed a large (222) diffraction peak with a smaller (400) peak, in contrast to ITO deposited with (400) orientation on an ordinary glass substrate. Using the ITO-mica film, a prototype model of a flexible organic light emitting diode was fabricated.