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Electrochemical etching using surface carboxylated graphite electrodes in ultrapure water
Electrochemical etching enables processing with an atomic-level accuracy, without deteriorating the physical properties of the workpiece; however, contamination of its surface with electrolytes is unavoidable. If it is possible to carry out electrochemical etching without using electrolytes, such a...
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Published in: | Electrochimica acta 2005-09, Vol.50 (27), p.5379-5383 |
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container_end_page | 5383 |
container_issue | 27 |
container_start_page | 5379 |
container_title | Electrochimica acta |
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creator | Ichii, Yoshio Mori, Yuzo Hirose, Kikuji Endo, Katsuyoshi Yamauchi, Kazuto Goto, Hidekazu |
description | Electrochemical etching enables processing with an atomic-level accuracy, without deteriorating the physical properties of the workpiece; however, contamination of its surface with electrolytes is unavoidable. If it is possible to carry out electrochemical etching without using electrolytes, such a process will be applicable to electronic device manufacturing and precision nanoscale processing of semiconductor materials. In addition, this process does not require the use of chemicals, cleaning after processing or disposal of waste fluid, which results in a low-cost and environmentally friendly process. To develop an electrochemical etching process that does not require the use of electrolytes, we proposed a method in which a functional-group-modified electrode is used as the cathode. A carboxylated graphite electrode was prepared by treating a graphite electrode with sulfuric acid. Electrolysis of ultrapure water was carried out using the obtained electrode as a cathode. The results indicate that the electrolysis current obtained using the modified electrode is approximately six-fold that obtained using an unmodified electrode. Furthermore, we can etch a Cu surface conically in ultrapure water. The current efficiency increases by 70% at maximum, and the minimum current required for electrochemical etching decreases compared with that in the case of using an unmodified electrode. |
doi_str_mv | 10.1016/j.electacta.2005.03.017 |
format | article |
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If it is possible to carry out electrochemical etching without using electrolytes, such a process will be applicable to electronic device manufacturing and precision nanoscale processing of semiconductor materials. In addition, this process does not require the use of chemicals, cleaning after processing or disposal of waste fluid, which results in a low-cost and environmentally friendly process. To develop an electrochemical etching process that does not require the use of electrolytes, we proposed a method in which a functional-group-modified electrode is used as the cathode. A carboxylated graphite electrode was prepared by treating a graphite electrode with sulfuric acid. Electrolysis of ultrapure water was carried out using the obtained electrode as a cathode. The results indicate that the electrolysis current obtained using the modified electrode is approximately six-fold that obtained using an unmodified electrode. 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Furthermore, we can etch a Cu surface conically in ultrapure water. The current efficiency increases by 70% at maximum, and the minimum current required for electrochemical etching decreases compared with that in the case of using an unmodified electrode.</description><subject>Carboxylation</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Electrochemical etching</subject><subject>Electrolysis</subject><subject>Exact sciences and technology</subject><subject>Graphite</subject><subject>Materials science</subject><subject>Physics</subject><subject>Surface treatments</subject><subject>Ultrapure water</subject><issn>0013-4686</issn><issn>1873-3859</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNqFkT1PwzAQhi0EEqXwG8gCW8LZTup4rKryIVVigYHJcuxL6ypNip0A_fe4agVjJes83PPeSc8Rcksho0AnD-sMGzS9ji9jAEUGPAMqzsiIloKnvCzkORkBUJ7mk3JySa5CWAOAmAgYkY_5Puw7s8KNM7pJsDcr1y6TIexrGHytDSZG-6r72TW6R5ssvd6uXI8JHrIWQ-LaZGj62Bg8Jt8R89fkotZNwJvjPybvj_O32XO6eH16mU0XqclB9ClKDprJMteUClFTaxEMoJFWCBC6yHPJRSWqoma8sjlFmVtTFXkpbEm1ZXxM7g9zt777HDD0auOCwabRLXZDUExyxkpJT4OlZFSCjKA4gMZ3IXis1da7jfY7RUHtnau1-nOu9s4VcBWdx-TdcYUOUWbtdWtc-I8Lyng8SOSmBw6jmC-HXgXjsDVonY9zle3cyV2_GMydWg</recordid><startdate>20050920</startdate><enddate>20050920</enddate><creator>Ichii, Yoshio</creator><creator>Mori, Yuzo</creator><creator>Hirose, Kikuji</creator><creator>Endo, Katsuyoshi</creator><creator>Yamauchi, Kazuto</creator><creator>Goto, Hidekazu</creator><general>Elsevier Ltd</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>H8G</scope><scope>JG9</scope><scope>L7M</scope><scope>7TB</scope><scope>FR3</scope></search><sort><creationdate>20050920</creationdate><title>Electrochemical etching using surface carboxylated graphite electrodes in ultrapure water</title><author>Ichii, Yoshio ; Mori, Yuzo ; Hirose, Kikuji ; Endo, Katsuyoshi ; Yamauchi, Kazuto ; Goto, Hidekazu</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c407t-e930a2984a1177f1dde0c0ec9d7707a544937b7b5f23bd41e94dcb5487d81ad23</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><topic>Carboxylation</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Electrochemical etching</topic><topic>Electrolysis</topic><topic>Exact sciences and technology</topic><topic>Graphite</topic><topic>Materials science</topic><topic>Physics</topic><topic>Surface treatments</topic><topic>Ultrapure water</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ichii, Yoshio</creatorcontrib><creatorcontrib>Mori, Yuzo</creatorcontrib><creatorcontrib>Hirose, Kikuji</creatorcontrib><creatorcontrib>Endo, Katsuyoshi</creatorcontrib><creatorcontrib>Yamauchi, Kazuto</creatorcontrib><creatorcontrib>Goto, Hidekazu</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Copper Technical Reference Library</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Engineering Research Database</collection><jtitle>Electrochimica acta</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ichii, Yoshio</au><au>Mori, Yuzo</au><au>Hirose, Kikuji</au><au>Endo, Katsuyoshi</au><au>Yamauchi, Kazuto</au><au>Goto, Hidekazu</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Electrochemical etching using surface carboxylated graphite electrodes in ultrapure water</atitle><jtitle>Electrochimica acta</jtitle><date>2005-09-20</date><risdate>2005</risdate><volume>50</volume><issue>27</issue><spage>5379</spage><epage>5383</epage><pages>5379-5383</pages><issn>0013-4686</issn><eissn>1873-3859</eissn><coden>ELCAAV</coden><abstract>Electrochemical etching enables processing with an atomic-level accuracy, without deteriorating the physical properties of the workpiece; however, contamination of its surface with electrolytes is unavoidable. If it is possible to carry out electrochemical etching without using electrolytes, such a process will be applicable to electronic device manufacturing and precision nanoscale processing of semiconductor materials. In addition, this process does not require the use of chemicals, cleaning after processing or disposal of waste fluid, which results in a low-cost and environmentally friendly process. To develop an electrochemical etching process that does not require the use of electrolytes, we proposed a method in which a functional-group-modified electrode is used as the cathode. A carboxylated graphite electrode was prepared by treating a graphite electrode with sulfuric acid. Electrolysis of ultrapure water was carried out using the obtained electrode as a cathode. The results indicate that the electrolysis current obtained using the modified electrode is approximately six-fold that obtained using an unmodified electrode. 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subjects | Carboxylation Cross-disciplinary physics: materials science rheology Electrochemical etching Electrolysis Exact sciences and technology Graphite Materials science Physics Surface treatments Ultrapure water |
title | Electrochemical etching using surface carboxylated graphite electrodes in ultrapure water |
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