Mechanical characteristics of tungsten-containing carbon nanosprings grown by FIB-CVD

Tungsten-containing carbon (WC) nanosprings fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD) using a source gas mixture of phenanthrene (C 14H 10) and tungsten hexacarbonyl (W(CO) 6) showed unique characteristics they could expand and contract as flexibly as macro-scale springs. Th...

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Bibliographic Details
Published in:Microelectronic engineering 2006-04, Vol.83 (4), p.808-810
Main Authors: Nakamatsu, K., Igaki, J., Nagase, M., Ichihashi, T., Matsui, S.
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Focused-ion-beam chemical vapor deposition
Mechanical characteristics
Micro- and nanoelectromechanical devices (mems/nems)
Microelectronic fabrication (materials and surfaces technology)
Nanospring
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Shear modulus
Spring constant
Tungsten-containing carbon
Young’s modulus
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Summary:Tungsten-containing carbon (WC) nanosprings fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD) using a source gas mixture of phenanthrene (C 14H 10) and tungsten hexacarbonyl (W(CO) 6) showed unique characteristics they could expand and contract as flexibly as macro-scale springs. The large micro-scale displacements of the WC nanosprings were measured through optical microscope observation. In addition, we found that the spring constants of the springs rose as the W content increased. Moreover, the WC springs with a W content higher than 3% had an estimated Young’s modulus of more than 200 GPa; this value exceeds Young’s modulus of diamond-like carbon springs grown by FIB-CVD and is feasible for nanoelectromechanical applications.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2006.01.130