Fabrication of Anodic-Alumina Films with Custom-Designed Arrays of Nanochannels

Focused ion beam (FIB) lithography can be used to selectively close nanochannels in an ordered array on an anodic‐alumina film, producing templates with the nanochannels arranged in custom‐designed geometries (see Figure). Nanochannel closing can be monitored by in‐situ FIB imaging. Nanodevices such...

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Bibliographic Details
Published in:Advanced materials (Weinheim) 2005-01, Vol.17 (2), p.222-225
Main Authors: Liu, N.-W., Datta, A., Liu, C.-Y., Peng, C.-Y., Wang, H.-H., Wang, Y.-L.
Format: Article
Language:English
Subjects:
Alumina
Alumina, anodic
anodic
focused ion beam
Lithography
Lithography, focused ion beam
Nanopatterning
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Summary:Focused ion beam (FIB) lithography can be used to selectively close nanochannels in an ordered array on an anodic‐alumina film, producing templates with the nanochannels arranged in custom‐designed geometries (see Figure). Nanochannel closing can be monitored by in‐situ FIB imaging. Nanodevices such as photonic‐crystal waveguides could be fabricated using this technique.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.200400380