Microfabrication and properties of the meta-materials

A series of optimized micro-fabrication processes for terahertz meta-materials, including left-handed materials and split ring resonators (SRR), are demonstrated and these meta-materials are measured using a transmission spectroscopy in terahertz time domain. The traditional fabrication processes of...

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Bibliographic Details
Published in:Microelectronic engineering 2006-04, Vol.83 (4), p.1364-1367
Main Authors: Quan, Baogang, Xu, Xinlong, Xia, Xiaoxiang, Yang, Haifang, Wang, Li, Cui, Zheng, Gu, Changzhi
Format: Article
Language:English
Subjects:
Applied sciences
Circuit properties
Electric, optical and optoelectronic circuits
Electronic circuits
Electronics
Exact sciences and technology
Materials
Microelectronic fabrication (materials and surfaces technology)
Microfabrication
Oscillators, resonators, synthetizers
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Split ring resonators
Terahertz time domain spectroscopy
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Summary:A series of optimized micro-fabrication processes for terahertz meta-materials, including left-handed materials and split ring resonators (SRR), are demonstrated and these meta-materials are measured using a transmission spectroscopy in terahertz time domain. The traditional fabrication processes of terahertz meta-materials were optimized, which enabled to fabricate large area and high quality meta-material samples. The transmission spectra of SRR samples which were fabricated with conventional and optimized microfabrication processes were calculated. By comparing these spectra, it is found that the quality of samples has an immediate influence on the transmission properties of meta-materials.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2006.01.124