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Microfabrication and properties of the meta-materials
A series of optimized micro-fabrication processes for terahertz meta-materials, including left-handed materials and split ring resonators (SRR), are demonstrated and these meta-materials are measured using a transmission spectroscopy in terahertz time domain. The traditional fabrication processes of...
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| Published in: | Microelectronic engineering 2006-04, Vol.83 (4), p.1364-1367 |
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| Main Authors: | , , , , , , |
| Format: | Article |
| Language: | English |
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| cited_by | cdi_FETCH-LOGICAL-c358t-179bfbf804b03e85571172fe5edf028acf906b2787f09cf3a11b9a29bb3cdb0c3 |
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| cites | cdi_FETCH-LOGICAL-c358t-179bfbf804b03e85571172fe5edf028acf906b2787f09cf3a11b9a29bb3cdb0c3 |
| container_end_page | 1367 |
| container_issue | 4 |
| container_start_page | 1364 |
| container_title | Microelectronic engineering |
| container_volume | 83 |
| creator | Quan, Baogang Xu, Xinlong Xia, Xiaoxiang Yang, Haifang Wang, Li Cui, Zheng Gu, Changzhi |
| description | A series of optimized micro-fabrication processes for terahertz
meta-materials, including left-handed materials and split ring resonators (SRR), are demonstrated and these
meta-materials are measured using a transmission spectroscopy in terahertz time domain. The traditional fabrication processes of terahertz
meta-materials were optimized, which enabled to fabricate large area and high quality
meta-material samples. The transmission spectra of SRR samples which were fabricated with conventional and optimized microfabrication processes were calculated. By comparing these spectra, it is found that the quality of samples has an immediate influence on the transmission properties of
meta-materials. |
| doi_str_mv | 10.1016/j.mee.2006.01.124 |
| format | article |
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meta-materials, including left-handed materials and split ring resonators (SRR), are demonstrated and these
meta-materials are measured using a transmission spectroscopy in terahertz time domain. The traditional fabrication processes of terahertz
meta-materials were optimized, which enabled to fabricate large area and high quality
meta-material samples. The transmission spectra of SRR samples which were fabricated with conventional and optimized microfabrication processes were calculated. By comparing these spectra, it is found that the quality of samples has an immediate influence on the transmission properties of
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meta-materials, including left-handed materials and split ring resonators (SRR), are demonstrated and these
meta-materials are measured using a transmission spectroscopy in terahertz time domain. The traditional fabrication processes of terahertz
meta-materials were optimized, which enabled to fabricate large area and high quality
meta-material samples. The transmission spectra of SRR samples which were fabricated with conventional and optimized microfabrication processes were calculated. By comparing these spectra, it is found that the quality of samples has an immediate influence on the transmission properties of
meta-materials.</description><subject>Applied sciences</subject><subject>Circuit properties</subject><subject>Electric, optical and optoelectronic circuits</subject><subject>Electronic circuits</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Materials</subject><subject>Microelectronic fabrication (materials and surfaces technology)</subject><subject>Microfabrication</subject><subject>Oscillators, resonators, synthetizers</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><subject>Split ring resonators</subject><subject>Terahertz time domain spectroscopy</subject><issn>0167-9317</issn><issn>1873-5568</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNp9kEtLBDEQhIMouK7-AG9z0duMeUwmCZ5EfMGKFz2HJNPBLPNYk6zgvzfLLnjz1DR8Vd1VCF0S3BBMupt1MwI0FOOuwaQhtD1CCyIFqznv5DFaFEbUihFxis5SWuOyt1guEH8NLs7e2BicyWGeKjP11SbOG4g5QKpmX-VPqEbIph5NhhjMkM7RiS8DLg5ziT4eH97vn-vV29PL_d2qdozLXBOhrLde4tZiBpJzQYigHjj0HlNpnFe4s1RI4bFynhlCrDJUWctcb7FjS3S99y0PfW0hZT2G5GAYzATzNmmqGG9bSQtI9mAJk1IErzcxjCb-aIL1riC91qUgvStIY6JLQUVzdTA3yZnBRzO5kP6EQgjG2c77ds9BSfodIOrkAkwO-hDBZd3P4Z8rv5b3euM</recordid><startdate>20060401</startdate><enddate>20060401</enddate><creator>Quan, Baogang</creator><creator>Xu, Xinlong</creator><creator>Xia, Xiaoxiang</creator><creator>Yang, Haifang</creator><creator>Wang, Li</creator><creator>Cui, Zheng</creator><creator>Gu, Changzhi</creator><general>Elsevier B.V</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>20060401</creationdate><title>Microfabrication and properties of the meta-materials</title><author>Quan, Baogang ; Xu, Xinlong ; Xia, Xiaoxiang ; Yang, Haifang ; Wang, Li ; Cui, Zheng ; Gu, Changzhi</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c358t-179bfbf804b03e85571172fe5edf028acf906b2787f09cf3a11b9a29bb3cdb0c3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Applied sciences</topic><topic>Circuit properties</topic><topic>Electric, optical and optoelectronic circuits</topic><topic>Electronic circuits</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>Materials</topic><topic>Microelectronic fabrication (materials and surfaces technology)</topic><topic>Microfabrication</topic><topic>Oscillators, resonators, synthetizers</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><topic>Split ring resonators</topic><topic>Terahertz time domain spectroscopy</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Quan, Baogang</creatorcontrib><creatorcontrib>Xu, Xinlong</creatorcontrib><creatorcontrib>Xia, Xiaoxiang</creatorcontrib><creatorcontrib>Yang, Haifang</creatorcontrib><creatorcontrib>Wang, Li</creatorcontrib><creatorcontrib>Cui, Zheng</creatorcontrib><creatorcontrib>Gu, Changzhi</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Microelectronic engineering</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Quan, Baogang</au><au>Xu, Xinlong</au><au>Xia, Xiaoxiang</au><au>Yang, Haifang</au><au>Wang, Li</au><au>Cui, Zheng</au><au>Gu, Changzhi</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Microfabrication and properties of the meta-materials</atitle><jtitle>Microelectronic engineering</jtitle><date>2006-04-01</date><risdate>2006</risdate><volume>83</volume><issue>4</issue><spage>1364</spage><epage>1367</epage><pages>1364-1367</pages><issn>0167-9317</issn><eissn>1873-5568</eissn><coden>MIENEF</coden><abstract>A series of optimized micro-fabrication processes for terahertz
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meta-materials are measured using a transmission spectroscopy in terahertz time domain. The traditional fabrication processes of terahertz
meta-materials were optimized, which enabled to fabricate large area and high quality
meta-material samples. The transmission spectra of SRR samples which were fabricated with conventional and optimized microfabrication processes were calculated. By comparing these spectra, it is found that the quality of samples has an immediate influence on the transmission properties of
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| fulltext | fulltext |
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| ispartof | Microelectronic engineering, 2006-04, Vol.83 (4), p.1364-1367 |
| issn | 0167-9317 1873-5568 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_29354482 |
| source | ScienceDirect Freedom Collection |
| subjects | Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronic circuits Electronics Exact sciences and technology Materials Microelectronic fabrication (materials and surfaces technology) Microfabrication Oscillators, resonators, synthetizers Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Split ring resonators Terahertz time domain spectroscopy |
| title | Microfabrication and properties of the meta-materials |
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