Modelling and optimization of a low-pressure DC glow discharge in stable regime

A study, both theoretical and experimental, of the steady regime of a glow discharge is reported where a nitrogen plasma is produced by a DC power source operating at a constant current through a 200–500 mA range. Two different models of this plasma are developed. The first one was designed to repro...

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Bibliographic Details
Published in:Surface & coatings technology 2007-02, Vol.201 (9), p.5454-5457
Main Authors: Granda-Gutiérrez, E.E., López-Callejas, R., Peña-Eguiluz, R., Benítez-Read, J.S., Pacheco-Sotelo, J.O., Valencia A., R., Mercado-Cabrera, A., Barocio, S.R.
Format: Article
Language:English
Subjects:
Applied sciences
Discharges
Exact sciences and technology
Ion implantation
Low pressure discharges
Medium-density plasma
Metals. Metallurgy
Modelling
Other surface treatments
Production techniques
Surface treatment
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Summary:A study, both theoretical and experimental, of the steady regime of a glow discharge is reported where a nitrogen plasma is produced by a DC power source operating at a constant current through a 200–500 mA range. Two different models of this plasma are developed. The first one was designed to reproduce the V–I characteristic curve where the transition from the background ionization regime to the saturation one takes place, and, from this, to the Townsend and breakdown regimes, respectively. The second model represents the plasma behaviour as that of a voltage operated current source which follows the power law depending on the gas pressure as i( υ) = Aυ n( p) . The experimental results confirm, to a high degree of coincidence, the predictions made by these models.
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2006.07.008