Low electrical resistivity polycrystalline SiGe films obtained by vertical LPCVD for MOS devices

In this study, authors present some morphological and electrical characterization of polycrystalline SiGe thin films (poly-SiGe) deposited by vertical LPCVD using SiH 4, GeH 4 and H 2 mixture in different deposition parameters aiming for MOS gate electrodes. The obtained thin films are very uniform...

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Bibliographic Details
Published in:Materials science & engineering. B, Solid-state materials for advanced technology Solid-state materials for advanced technology, 2005-12, Vol.124, p.138-142
Main Authors: Teixeira, Ricardo Cotrin, Doi, Ioshiaki, Zakia, Maria Beny Pinto, Diniz, José Alexandre, Swart, Jacobus Willibrordus
Format: Article
Language:English
Subjects:
Electrical charecterization
LPCVD
MOS
Poly-Si
Poly-SiGe
SiON
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Summary:In this study, authors present some morphological and electrical characterization of polycrystalline SiGe thin films (poly-SiGe) deposited by vertical LPCVD using SiH 4, GeH 4 and H 2 mixture in different deposition parameters aiming for MOS gate electrodes. The obtained thin films are very uniform and smooth, with small grain size, feasible to deep submicrom fabrication. The SiGe samples presented resistivity values as low as 0.42 mΩ cm, one order of magnitude lower than poly-Si reference samples. CV and IV measurements points this poly-SiGe as a suitable material for MOS gate electrodes.
ISSN:0921-5107
1873-4944
DOI:10.1016/j.mseb.2005.08.060