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Influence of VI:II ratio on the properties of MOCVD-grown ZnO thin films

We report on the impact the MOCVD VI:II ratio during growth has on the properties of ZnO thin films grown on glass slides using diethyl zinc (DEZ) and tert‐butanol (TBOH) as precursors. Our work displays the critical effect of this growth parameter on the defects located in the crystal lattice. Oxyg...

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Bibliographic Details
Published in:Physica status solidi. A, Applied research Applied research, 2004-08, Vol.201 (10), p.2213-2218
Main Authors: Pagni, O., Leitch, A. W. R.
Format: Article
Language:English
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Summary:We report on the impact the MOCVD VI:II ratio during growth has on the properties of ZnO thin films grown on glass slides using diethyl zinc (DEZ) and tert‐butanol (TBOH) as precursors. Our work displays the critical effect of this growth parameter on the defects located in the crystal lattice. Oxygen vacancies and other oxygen‐induced defects are shown to affect the films' tensile strain, stress, grain size, bandgap structure, and dispersion properties. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
ISSN:0031-8965
1521-396X
DOI:10.1002/pssa.200404827