A new fast inchworm type actuator with the robust I/Q heterodyne interferometer feedback

The precision stage is an essential device for micromachine assembly systems, and semiconductor equipments. A new fast piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long stroke linear servo stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is de...

Full description

Saved in:
Bibliographic Details
Published in:Mechatronics (Oxford) 2006-03, Vol.16 (2), p.105-110
Main Authors: Moon, Chanwoo, Lee, Sungho, Chung, J.K.
Format: Article
Language:English
Subjects:
Applied sciences
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
I/Q heterodyne interferometer
Inchworm actuator
Mechanical engineering. Machine design
Physics
Precision stage
Solid mechanics
Structural and continuum mechanics
Synchronized counting method
Vibration, mechanical wave, dynamic stability (aeroelasticity, vibration control...)
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
cited_by cdi_FETCH-LOGICAL-c385t-5591b00d4fb4ab7d78fa11e2eb2b3ff143ba9353e04fdc6a172b0e4d37b74e333
cites cdi_FETCH-LOGICAL-c385t-5591b00d4fb4ab7d78fa11e2eb2b3ff143ba9353e04fdc6a172b0e4d37b74e333
container_end_page 110
container_issue 2
container_start_page 105
container_title Mechatronics (Oxford)
container_volume 16
creator Moon, Chanwoo
Lee, Sungho
Chung, J.K.
description The precision stage is an essential device for micromachine assembly systems, and semiconductor equipments. A new fast piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long stroke linear servo stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is devised as a feedback sensor in the servo system, and a synchronized counting method is proposed to measure the position of the stage accurately. Proposed measurement system can measure the precise position of fast moving object with robustness to the vibration of inchworm actuator.
doi_str_mv 10.1016/j.mechatronics.2005.10.003
format article
fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_29469160</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0957415805001303</els_id><sourcerecordid>29469160</sourcerecordid><originalsourceid>FETCH-LOGICAL-c385t-5591b00d4fb4ab7d78fa11e2eb2b3ff143ba9353e04fdc6a172b0e4d37b74e333</originalsourceid><addsrcrecordid>eNqNkE1rGzEQhkVoIa7b_yAKyW2d0Uq72s0tJE0aCJRCC70JSTti5XpXjiTH-N9XxoH0mNN8PfMO8xLylcGKAWuv1qsJ7ahzDLO3aVUDNGWwAuBnZME6ySsB0H4gC-gbWQnWdOfkU0prACYZkwvy54bOuKdOp0z9bMd9iBPNhy1SbfNO5xDp3ueR5hFpDGZXsMern3TEjDEMhxnLVkldqaZjjzrEwWj79zP56PQm4ZfXuCS_77_9uv1ePf14eLy9eaos75pcNU3PDMAgnBHayEF2TjOGNZracOeY4Eb3vOEIwg221UzWBlAMXBopkHO-JJcn3W0MzztMWU0-Wdxs9Ixhl1Tdi7ZnLRTw-gTaGFKK6NQ2-knHg2KgjmaqtfrfTHU08zgrZpbli9crOlm9cVHP1qc3BSm6TvC2cHcnDsvLLx6jStbjbHHwEW1WQ_DvOfcPEDGS-g</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>29469160</pqid></control><display><type>article</type><title>A new fast inchworm type actuator with the robust I/Q heterodyne interferometer feedback</title><source>ScienceDirect Freedom Collection 2022-2024</source><creator>Moon, Chanwoo ; Lee, Sungho ; Chung, J.K.</creator><creatorcontrib>Moon, Chanwoo ; Lee, Sungho ; Chung, J.K.</creatorcontrib><description>The precision stage is an essential device for micromachine assembly systems, and semiconductor equipments. A new fast piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long stroke linear servo stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is devised as a feedback sensor in the servo system, and a synchronized counting method is proposed to measure the position of the stage accurately. Proposed measurement system can measure the precise position of fast moving object with robustness to the vibration of inchworm actuator.</description><identifier>ISSN: 0957-4158</identifier><identifier>EISSN: 1873-4006</identifier><identifier>DOI: 10.1016/j.mechatronics.2005.10.003</identifier><language>eng</language><publisher>Oxford: Elsevier Ltd</publisher><subject>Applied sciences ; Exact sciences and technology ; Fundamental areas of phenomenology (including applications) ; I/Q heterodyne interferometer ; Inchworm actuator ; Mechanical engineering. Machine design ; Physics ; Precision stage ; Solid mechanics ; Structural and continuum mechanics ; Synchronized counting method ; Vibration, mechanical wave, dynamic stability (aeroelasticity, vibration control...)</subject><ispartof>Mechatronics (Oxford), 2006-03, Vol.16 (2), p.105-110</ispartof><rights>2005 Elsevier Ltd</rights><rights>2006 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c385t-5591b00d4fb4ab7d78fa11e2eb2b3ff143ba9353e04fdc6a172b0e4d37b74e333</citedby><cites>FETCH-LOGICAL-c385t-5591b00d4fb4ab7d78fa11e2eb2b3ff143ba9353e04fdc6a172b0e4d37b74e333</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&amp;idt=17488436$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Moon, Chanwoo</creatorcontrib><creatorcontrib>Lee, Sungho</creatorcontrib><creatorcontrib>Chung, J.K.</creatorcontrib><title>A new fast inchworm type actuator with the robust I/Q heterodyne interferometer feedback</title><title>Mechatronics (Oxford)</title><description>The precision stage is an essential device for micromachine assembly systems, and semiconductor equipments. A new fast piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long stroke linear servo stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is devised as a feedback sensor in the servo system, and a synchronized counting method is proposed to measure the position of the stage accurately. Proposed measurement system can measure the precise position of fast moving object with robustness to the vibration of inchworm actuator.</description><subject>Applied sciences</subject><subject>Exact sciences and technology</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>I/Q heterodyne interferometer</subject><subject>Inchworm actuator</subject><subject>Mechanical engineering. Machine design</subject><subject>Physics</subject><subject>Precision stage</subject><subject>Solid mechanics</subject><subject>Structural and continuum mechanics</subject><subject>Synchronized counting method</subject><subject>Vibration, mechanical wave, dynamic stability (aeroelasticity, vibration control...)</subject><issn>0957-4158</issn><issn>1873-4006</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNqNkE1rGzEQhkVoIa7b_yAKyW2d0Uq72s0tJE0aCJRCC70JSTti5XpXjiTH-N9XxoH0mNN8PfMO8xLylcGKAWuv1qsJ7ahzDLO3aVUDNGWwAuBnZME6ySsB0H4gC-gbWQnWdOfkU0prACYZkwvy54bOuKdOp0z9bMd9iBPNhy1SbfNO5xDp3ueR5hFpDGZXsMern3TEjDEMhxnLVkldqaZjjzrEwWj79zP56PQm4ZfXuCS_77_9uv1ePf14eLy9eaos75pcNU3PDMAgnBHayEF2TjOGNZracOeY4Eb3vOEIwg221UzWBlAMXBopkHO-JJcn3W0MzztMWU0-Wdxs9Ixhl1Tdi7ZnLRTw-gTaGFKK6NQ2-knHg2KgjmaqtfrfTHU08zgrZpbli9crOlm9cVHP1qc3BSm6TvC2cHcnDsvLLx6jStbjbHHwEW1WQ_DvOfcPEDGS-g</recordid><startdate>20060301</startdate><enddate>20060301</enddate><creator>Moon, Chanwoo</creator><creator>Lee, Sungho</creator><creator>Chung, J.K.</creator><general>Elsevier Ltd</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SC</scope><scope>7SP</scope><scope>7TB</scope><scope>8FD</scope><scope>FR3</scope><scope>JQ2</scope><scope>L7M</scope><scope>L~C</scope><scope>L~D</scope></search><sort><creationdate>20060301</creationdate><title>A new fast inchworm type actuator with the robust I/Q heterodyne interferometer feedback</title><author>Moon, Chanwoo ; Lee, Sungho ; Chung, J.K.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c385t-5591b00d4fb4ab7d78fa11e2eb2b3ff143ba9353e04fdc6a172b0e4d37b74e333</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Applied sciences</topic><topic>Exact sciences and technology</topic><topic>Fundamental areas of phenomenology (including applications)</topic><topic>I/Q heterodyne interferometer</topic><topic>Inchworm actuator</topic><topic>Mechanical engineering. Machine design</topic><topic>Physics</topic><topic>Precision stage</topic><topic>Solid mechanics</topic><topic>Structural and continuum mechanics</topic><topic>Synchronized counting method</topic><topic>Vibration, mechanical wave, dynamic stability (aeroelasticity, vibration control...)</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Moon, Chanwoo</creatorcontrib><creatorcontrib>Lee, Sungho</creatorcontrib><creatorcontrib>Chung, J.K.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Computer and Information Systems Abstracts</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Mechanical &amp; Transportation Engineering Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>ProQuest Computer Science Collection</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Computer and Information Systems Abstracts – Academic</collection><collection>Computer and Information Systems Abstracts Professional</collection><jtitle>Mechatronics (Oxford)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Moon, Chanwoo</au><au>Lee, Sungho</au><au>Chung, J.K.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A new fast inchworm type actuator with the robust I/Q heterodyne interferometer feedback</atitle><jtitle>Mechatronics (Oxford)</jtitle><date>2006-03-01</date><risdate>2006</risdate><volume>16</volume><issue>2</issue><spage>105</spage><epage>110</epage><pages>105-110</pages><issn>0957-4158</issn><eissn>1873-4006</eissn><abstract>The precision stage is an essential device for micromachine assembly systems, and semiconductor equipments. A new fast piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long stroke linear servo stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is devised as a feedback sensor in the servo system, and a synchronized counting method is proposed to measure the position of the stage accurately. Proposed measurement system can measure the precise position of fast moving object with robustness to the vibration of inchworm actuator.</abstract><cop>Oxford</cop><pub>Elsevier Ltd</pub><doi>10.1016/j.mechatronics.2005.10.003</doi><tpages>6</tpages></addata></record>
fulltext fulltext
identifier ISSN: 0957-4158
ispartof Mechatronics (Oxford), 2006-03, Vol.16 (2), p.105-110
issn 0957-4158
1873-4006
language eng
recordid cdi_proquest_miscellaneous_29469160
source ScienceDirect Freedom Collection 2022-2024
subjects Applied sciences
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
I/Q heterodyne interferometer
Inchworm actuator
Mechanical engineering. Machine design
Physics
Precision stage
Solid mechanics
Structural and continuum mechanics
Synchronized counting method
Vibration, mechanical wave, dynamic stability (aeroelasticity, vibration control...)
title A new fast inchworm type actuator with the robust I/Q heterodyne interferometer feedback
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-30T22%3A27%3A48IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=A%20new%20fast%20inchworm%20type%20actuator%20with%20the%20robust%20I/Q%20heterodyne%20interferometer%20feedback&rft.jtitle=Mechatronics%20(Oxford)&rft.au=Moon,%20Chanwoo&rft.date=2006-03-01&rft.volume=16&rft.issue=2&rft.spage=105&rft.epage=110&rft.pages=105-110&rft.issn=0957-4158&rft.eissn=1873-4006&rft_id=info:doi/10.1016/j.mechatronics.2005.10.003&rft_dat=%3Cproquest_cross%3E29469160%3C/proquest_cross%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c385t-5591b00d4fb4ab7d78fa11e2eb2b3ff143ba9353e04fdc6a172b0e4d37b74e333%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=29469160&rft_id=info:pmid/&rfr_iscdi=true