Template-Assisted Fabrication of Dense, Aligned Arrays of Titania Nanotubes with Well-Controlled Dimensions on Substrates

Dense arrays of vertically aligned titania nanotubes (see Figure) are created directly on silicon substrates by combining atomic layer deposition with an alumina template‐based fabrication approach. This method enables excellent control over the nanotube dimensions, including their wall thickness, d...

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Bibliographic Details
Published in:Advanced materials (Weinheim) 2004-11, Vol.16 (22), p.2052-2057
Main Authors: Sander, M. S., Côté, M. J., Gu, W., Kile, B. M., Tripp, C. P.
Format: Article
Language:English
Subjects:
Alumina
Atomic layer deposition
Nanotubes
Titania
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Summary:Dense arrays of vertically aligned titania nanotubes (see Figure) are created directly on silicon substrates by combining atomic layer deposition with an alumina template‐based fabrication approach. This method enables excellent control over the nanotube dimensions, including their wall thickness, diameter, and height. Nanotubes were fabricated with tube walls thin enough (
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.200400446