Template-Assisted Fabrication of Dense, Aligned Arrays of Titania Nanotubes with Well-Controlled Dimensions on Substrates

Dense arrays of vertically aligned titania nanotubes (see Figure) are created directly on silicon substrates by combining atomic layer deposition with an alumina template‐based fabrication approach. This method enables excellent control over the nanotube dimensions, including their wall thickness, d...

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Published in:Advanced materials (Weinheim) 2004-11, Vol.16 (22), p.2052-2057
Main Authors: Sander, M. S., Côté, M. J., Gu, W., Kile, B. M., Tripp, C. P.
Format: Article
Language:English
Subjects:
Alumina
Atomic layer deposition
Nanotubes
Titania
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description Dense arrays of vertically aligned titania nanotubes (see Figure) are created directly on silicon substrates by combining atomic layer deposition with an alumina template‐based fabrication approach. This method enables excellent control over the nanotube dimensions, including their wall thickness, diameter, and height. Nanotubes were fabricated with tube walls thin enough (
doi_str_mv 10.1002/adma.200400446
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subjects Alumina
Atomic layer deposition
Nanotubes
Titania
title Template-Assisted Fabrication of Dense, Aligned Arrays of Titania Nanotubes with Well-Controlled Dimensions on Substrates
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