Determination of energy dependent ionization probabilities of sputtered particles

We present a novel method to determine the spectral ionization probability of sputtered species as a function of their emission velocity or energy. The technique is based on detection of neutral and ionic species in a reflectron time-of-flight mass spectrometer under otherwise identical experimental...

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Bibliographic Details
Published in:Applied surface science 2006-07, Vol.252 (19), p.6452-6455
Main Authors: Mazarov, P., Samartsev, A.V., Wucher, A.
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Kinetic energy distribution
Physics
Spectral ionization probability
Sputtering
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Summary:We present a novel method to determine the spectral ionization probability of sputtered species as a function of their emission velocity or energy. The technique is based on detection of neutral and ionic species in a reflectron time-of-flight mass spectrometer under otherwise identical experimental conditions. Using a pulsed ion extraction scheme in combination with sufficiently short primary ion pulses, the spectral ionization probability α + ( v ) can be determined without knowledge of possible energy discrimination effects in instrument transmission. Comparing the measured ionization probability with theoretical predictions, we find that none of the prevailing ionization models is capable of describing the experimental data over the whole velocity range studied.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2006.02.071