A preliminary investigation of thermo-elastic damping in silicon rings

Zener's model for thermo-elastic loss, when applied to uniform beams undergoing flexural vibrations, gives theoretical predictions of mechanical Q-factor that often agree well with experimental measurements. The use of silicon ring resonators in MEMS devices is now becoming increasingly common....

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2004-09, Vol.14 (9), p.S108-S113
Main Authors: Wong, S J, Fox, C H J, McWilliam, S, Fell, C P, Eley, R
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Precision engineering, watch making
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Summary:Zener's model for thermo-elastic loss, when applied to uniform beams undergoing flexural vibrations, gives theoretical predictions of mechanical Q-factor that often agree well with experimental measurements. The use of silicon ring resonators in MEMS devices is now becoming increasingly common. This paper considers the application of Zener's theory to thin, circular rings and presents a simple expression for the Q-factor associated with in-plane flexural modes of vibration. The theoretical predictions are shown to be in good agreement with experimental measurements for a practically relevant range of ring sizes. The relationships between ring dimensions, ambient temperature and Q-factor are explored.
ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/14/9/019