Plasma study and deposition of DLC/TiC/Ti multilayer structures using technique combining pulsed laser deposition and magnetron sputtering

We prepared nanostructured coatings composed of diamond-like carbon (DLC), titanium and titanium carbide using a new hybrid technique combining pulsed laser deposition (PLD) with magnetron sputtering. The whole deposition process was fully computer controlled. The coatings consist from a number of 1...

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Published in:Surface & coatings technology 2005-10, Vol.200 (1-4), p.708-711
Main Authors: Bulíř, J., Novotný, M., Jelínek, M., Kocourek, T., Studnička, V.
Format: Article
Language:English
Subjects:
Applied sciences
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Magnetron
Materials science
Metals. Metallurgy
Nanostructure
Optical emission spectroscopy
Other topics in materials science
Physics
Production techniques
Pulsed laser deposition
Surface treatment
X-ray diffraction
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cited_by cdi_FETCH-LOGICAL-c470t-4ddb2b91c98feb48b58a0a52869bc1b9bedc121fbeed81626deab1be905f46963
cites cdi_FETCH-LOGICAL-c470t-4ddb2b91c98feb48b58a0a52869bc1b9bedc121fbeed81626deab1be905f46963
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container_issue 1-4
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container_title Surface & coatings technology
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creator Bulíř, J.
Novotný, M.
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Kocourek, T.
Studnička, V.
description We prepared nanostructured coatings composed of diamond-like carbon (DLC), titanium and titanium carbide using a new hybrid technique combining pulsed laser deposition (PLD) with magnetron sputtering. The whole deposition process was fully computer controlled. The coatings consist from a number of 1–20 nm-thick alternating particular layers forming in total 0.4 μm-thick structure. A set of samples with different relative composition of Ti, TiC and DLC were prepared. Thin interlayer of titanium carbide was formed by simultaneous process of pulsed laser deposition (carbon) and magnetron sputtering (Ti). Microstructure was characterized by XRD. Mechanical properties were measured. The deposition process was investigated using an optical emission spectroscopy. The plasma was analyzed with a spatial and a time resolution.
doi_str_mv 10.1016/j.surfcoat.2005.01.087
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subjects Applied sciences
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Magnetron
Materials science
Metals. Metallurgy
Nanostructure
Optical emission spectroscopy
Other topics in materials science
Physics
Production techniques
Pulsed laser deposition
Surface treatment
X-ray diffraction
title Plasma study and deposition of DLC/TiC/Ti multilayer structures using technique combining pulsed laser deposition and magnetron sputtering
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