Phase formation by ion beam mixing in the Ti/Si multilayer system

• Published in: Applied surface science 2006-03, Vol.252 (11), p.4016-4019
• Main Authors: Sisodia, Veenu, Kabiraj, D., Bolse, W., Jain, I.P.
• Format: Article
• Language: English
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Ion beam mixing; Irradiation; Physics; Swift heavy ion
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2005.09.035

The irradiation effect of 350 MeV Au + ions on Ti/Si multilayers has been studied using Rutherford backscattering spectroscopy, X-ray reflectivity (XRR) and grazing incidence X-ray diffraction (GIXRD). Intermixing effects have been studied as a function of fluences of 0.46 × 10 14, 1.82 × 10 14 and 4.62 × 10 14 cm −2. Rutherford backscattering spectra (RBS) confirm mixing at the interface. X-ray reflectivity patterns show damage at the interfaces with the absence of a continuous fringe pattern at high fluence doses in comparison to the pristine interface. Mixing leads to titanium di-silicide (TiSi 2) phase formation as a shown by grazing incidence X-ray diffraction patterns. The observed intermixing is attributed to energy deposited by the incident ions in the electronic system of the target. Swift heavy ion irradiation induced intermixing increases with fluence.