Antiadhesion Surface Treatments of Molds for High-Resolution Unconventional Lithography

A new strategy to achieve antiadhesion surface coatings is introduced. The approach, which uses molds coated in a thin film of poly(dimethylsiloxane) (PDMS, see figure) to achieve the antiadhesive surfaces, is applicable to virtually any type of mold material due to the use of silane chemistry and t...

Full description

Saved in:
Bibliographic Details
Published in:Advanced materials (Weinheim) 2006-12, Vol.18 (23), p.3115-3119
Main Authors: Lee, M. J., Lee, N. Y., Lim, J. R., Kim, J. B., Kim, M., Baik, H. K., Kim, Y. S.
Format: Article
Language:English
Subjects:
Coatings
Lithography
Molding
Nanolithography
Poly(dimethylsiloxane)
Surface modification
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A new strategy to achieve antiadhesion surface coatings is introduced. The approach, which uses molds coated in a thin film of poly(dimethylsiloxane) (PDMS, see figure) to achieve the antiadhesive surfaces, is applicable to virtually any type of mold material due to the use of silane chemistry and the low surface energy of PDMS. This allows simple and rapid replication of high complexity, high‐aspect‐ratio nanostructures with excellent replication fidelity.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.200601268