Cluster beam deposition: a tool for nanoscale science and technology

Gas phase nanoparticle production, manipulation and deposition is of primary importance for the synthesis of nanostructured materials and for the development of industrial processes based on nanotechnology. In this review we present and discuss this approach, introducing cluster sources, nanoparticl...

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 2006-11, Vol.39 (22), p.R439-R459
Main Authors: Wegner, K, Piseri, P, Tafreshi, H Vahedi, Milani, P
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of nanofabrication
Nanoscale materials and structures: fabrication and characterization
Other topics in nanoscale materials and structures
Physics
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Summary:Gas phase nanoparticle production, manipulation and deposition is of primary importance for the synthesis of nanostructured materials and for the development of industrial processes based on nanotechnology. In this review we present and discuss this approach, introducing cluster sources, nanoparticle formation and growth mechanisms and the use of aerodynamic focusing methods that are coupled with supersonic expansions to obtain high intensity cluster beams with a control on nanoparticle mass and spatial distribution. The implication of this technique for the synthesis of nanostructured materials is also presented and applications are highlighted.
ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/39/22/R02