Single-molecule transistor fabrication by self-aligned lithography and in situ molecular assembly

We describe the fabrication of single-molecule transistors by self-aligned lithography and in situ molecular assembly. Ultrathin metallic electrodes are patterned with a nanoscale interelectrode separation defined by the lateral oxidation of a thin layer of Al. Highly conjugated molecular units are...

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Bibliographic Details
Published in:Microelectronic engineering 2006-04, Vol.83 (4), p.1706-1709
Main Authors: Tang, J., De Poortere, E.P., Klare, J.E., Nuckolls, C., Wind, S.J.
Format: Article
Language:English
Subjects:
Applied sciences
Display
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Molecular electronics
Molecular electronics, nanoelectronics
Molecular self-assembly
Nanolithography
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Summary:We describe the fabrication of single-molecule transistors by self-aligned lithography and in situ molecular assembly. Ultrathin metallic electrodes are patterned with a nanoscale interelectrode separation defined by the lateral oxidation of a thin layer of Al. Highly conjugated molecular units are sequentially assembled within the electrode gap by selective design of the molecular end group chemistry. The assembled devices display evidence of molecular conduction.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2006.01.165