Autonomous on-wafer sensors for process modeling, diagnosis, and control

This paper explores the feasibility of constructing an autonomous sensor array on a standard silicon wafer. Such a sensor-wafer would include integrated electronics, power, and communications, and would be capable of being placed into a standard production process step, or short sequence of steps. D...

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Bibliographic Details
Published in:IEEE transactions on semiconductor manufacturing 2001-08, Vol.14 (3), p.255-264
Main Authors: Freed, M., Kruger, M., Spanos, C.J., Poolla, K.
Format: Article
Language:English
Subjects:
Autonomous
Calibration
Communication standards
Diagnosis
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Process design
Production
Qualifications
Semiconductor device modeling
Semiconductors
Sensor arrays
Sensor phenomena and characterization
Sensors
Silicon
Temperature measurement
Thermal instruments, apparatus and techniques
Thermometry
Wafers
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Description
Summary:This paper explores the feasibility of constructing an autonomous sensor array on a standard silicon wafer. Such a sensor-wafer would include integrated electronics, power, and communications, and would be capable of being placed into a standard production process step, or short sequence of steps. During the processing of the sensor-wafer, various process parameters would be measured and recorded. There are several uses for such a sensor wafer, including equipment characterization and design, process calibration, and equipment qualification and diagnosis. In this paper, various sensor architectures, power supplies, communications methods, and isolation techniques are discussed, and particular choices are made. Several proof-of-concept designs that measure film-thickness and temperature are discussed, and test results are reviewed for each design.
ISSN:0894-6507
1558-2345
DOI:10.1109/66.939823