Trimethylindium transport studies: the effect of different bubbler designs

The transport of trimethylindium (TMI) must be highly reliable throughout the lifetime of a bubbler. This study reports stability data and transport rates obtained for a number of alternative bubbler designs when tested under different conditions of use. The best results, with exceptionally stable f...

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Bibliographic Details
Published in:Journal of crystal growth 2004-12, Vol.272 (1), p.37-41
Main Authors: Smith, L.M., Odedra, R., Kingsley, A.J., Coward, K.M., Rushworth, S.A., Williams, G., Leese, T.A., Purdie, A.J., Kanjolia, R.K.
Format: Article
Language:English
Subjects:
A1. Organometallic precursors
A3. Metalorganic vapour phase epitaxy
A3. Organometallic vapour-phase epitaxy
B1. Precursors
B1. Trimethylindium
B2. Semiconducting III–V materials
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Growth from vapor
Materials science
Methods of crystal growth
physics of crystal growth
Physics
Theory and models of crystal growth
physics of crystal growth, crystal morphology and orientation
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Summary:The transport of trimethylindium (TMI) must be highly reliable throughout the lifetime of a bubbler. This study reports stability data and transport rates obtained for a number of alternative bubbler designs when tested under different conditions of use. The best results, with exceptionally stable flux output across a wide range of operating parameters throughout the bubbler lifetime, were obtained using a novel perforated disc design. This design is an extension of the cross dipleg concept which provides multiple gas pathways to minimise channelling effects and allow uniform and efficient depletion of the bubbler contents.
ISSN:0022-0248
1873-5002
DOI:10.1016/j.jcrysgro.2004.08.108